The CMOSens® mass flow meter SFM4100 from Sensirion is used to measure air and other non-aggressive gases. It provides a wide dynamic measuring range, which is up to 20 slm. The sensor unit has a digital I2C interface, provides a fully calibrated and temperature compensated output signal, which operates reliably at pressure of up to 7 bar. The SFM4100 series features a fourth-generation silicon sensor chip called SF04.
In addition to a thermal mass flow sensor element, the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and interface. The unit has a self-test feature, which allows the testing of the entire signal chain while the mass flow meter is in use. The unit is commonly used for anesthesia and other medical instruments.