CMOS inspection system TR7900Q SII

video visionLEDcamera

Introduction
The TR7900Q SII is built on a 2.5 μm high-resolution platform with 25 MPix imaging technology for the semiconductor and advanced packaging industry. AI-powered algorithms and metrology capabilities enhance the Smart 3D AOI solution's effectiveness. The 3D SEMI AOI fully integrates with loader/unloader modules to simplify handling of strips and magazines. The Stop-and-Go 3D AOI inspects die bonding, wire/ball/ribbon/wedge bonding, SiP, underfill, SMD, bumps and solder joints. The Smart Factory AOI inspects wire diameters down to 15 μm (0.6 mil).

Features

• Advanced package defect detection for wire bonding and die bonding
• 2.5 μm high-resolution 3D AOI with metrology-grade measurement capabilities
• Built-in loader and unloader for magazine handling
• AI-powered wire detection (optional)
• Inspection of Au, Al, Ag and Cu wires down to 15 μm
• Bond inspection: ball bond, wedge bond, ribbon bond
• Shortwave Infrared (SWIR) lighting for inner crack and chipping detection (optional)
• Clean room compatibility: Class 1000 (ISO Class 6, ISO 14644-1)

Optical System (key items)
Imaging method: Stop-and-Go Imaging
Top camera: 25 Mpix
Imaging resolution: 2.5 μm
Lighting: Multi-phase true color LED
3D technology: Quad digital fringe projectors
Max. 3D height range: 15 mm

Motion Table & Control (key items)
X-axis control: Ball screw + AC servo motor or linear motor
Y-axis control: Dual ball screw + AC servo motor or dual linear motor (optional)
Z-axis control: Ball screw + AC servo motor (reducer optional)
X-Y axis resolution: 0.1 μm

Board / Magazine Handling (key items)
Max. stack magazine qty.: 3 magazines (based on magazine width 125 mm)
Magazine width: 50 - 175 mm
Magazine length: 120 - 320 mm
Magazine height: 80 - 150 mm
Strip width*: 35 - 150 mm
Strip length: 100 - 285 mm
Strip thickness: 0.1 - 1.5 mm
*When strip width is between 35–54 mm, special design required
Max. strip weight: 0.5 kg
Strip carrier / fixing: Belt conveyor
Top clearance: 7 mm
Bottom clearance: 10 mm
Edge clearance: 3 mm

Inspection Functions (examples of detectable defects and measurements)
Die bonding: missing, orientation, rotation, shift, tilted, chipping, crack, scratch, foreign material; bond line thickness; epoxy on die; epoxy coverage; epoxy height
Wire bonding: broken, short, sweep/sink, missing, sway, collapse, loop height, sagged wire, cross wire gap; wire tracing; ball bond diameter; ball placement; stitch width; stitch coverage over ball; ball-off pad; clubbed ball; ball thickness; lifted ball; low landing; bond on contamination; foreign material
Bonding area / pad: copper protrusion; crack; chipping; exposed copper; exposed nickel; target material; scratches or brush marks; oxidation; foreign material

Dimensions & Weight
WxDxH (without auto load/unload module): 990 x 1495 x 1700 mm
WxDxH (with auto load/unload module): 2065 x 1490 x 1700 mm
Note: signal tower not included; signal tower height 515 mm
Weight: 823 kg (without auto load/unload module); 989.5 kg (with auto load/unload module)

Notes
Optional modules: AI-powered wire detection, SWIR lighting and other optional modules may be available. The system integrates loader/unloader modules to facilitate handling of strips and magazines.

Technical specifications

• Model: TR7900Q SII
• Imaging method: Stop-and-Go Imaging
• Top camera resolution: 25 Mpix
• Imaging resolution: 2.5 μm
• Lighting: Multi-phase true color LED (SWIR optional)
• 3D technology: Quad digital fringe projectors
• Max. 3D height range: 15 mm
• X-Y axis resolution: 0.1 μm
• X-axis control: Ball screw + AC servo motor or linear motor
• Y-axis control: Dual ball screw + AC servo motor or dual linear motor (optional)
• Z-axis control: Ball screw + AC servo motor (reducer optional)
• Max. stack magazines: 3 (based on 125 mm magazine width)
• Magazine width: 50 - 175 mm
• Magazine length: 120 - 320 mm
• Magazine height: 80 - 150 mm
• Strip width: 35 - 150 mm (special design for 35–54 mm)
• Strip length: 100 - 285 mm
• Strip thickness: 0.1 - 1.5 mm
• Max. strip weight: 0.5 kg
• Carrier / fixing: Belt conveyor
• Top clearance: 7 mm; Bottom clearance: 10 mm; Edge clearance: 3 mm
• WxDxH (no loader): 990 x 1495 x 1700 mm
• WxDxH (with loader): 2065 x 1490 x 1700 mm
• Weight: 823 kg (no loader); 989.5 kg (with loader)