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... data for complete characterization of process issues during development and high volume manufacturing. Defect discovery, Hotspot discovery, Process debug, EUV print check, Engineering analysis, Line monitoring, Process ...
KLA Corporation
... High-productivity broadband inspection for diverse substrates (Si, SiC, GaN, glass) and wafer sizes (150/200/300mm) with DesignWise® and DefectWise® AI.
KLA Corporation
... , consumer electronics and industrial (military, aerospace, medical) markets. The C30x inspectors leverage a tunable broadband illumination source, advanced optics and a low noise sensor to capture critical defects across ...
KLA Corporation
... The Puma™ 9980 laser scanning inspection system incorporates multiple sensitivity and speed enhancements that enable capture of critical defects of interest (DOI) at throughputs required for high volume manufacturing for 1Xnm advanced ...
KLA Corporation
... throughput for efficient process control. The modules comprising the latest-generation CIRCL5 system include: front side wafer defect inspection; wafer edge defect inspection, profile, metrology and review; ...
KLA Corporation
... defect classification (IBC) using revolutionary machine learning algorithms support faster time to root cause, while the Z7™ classification engine supports unique 3D NAND and thick film applications. Process qualification, ...
KLA Corporation
... Corporation. Defect imaging, Automatic inline defect classification and performance management, Bare wafer outgoing and incoming quality control, Wafer dispositioning, Defect discovery, Process window discovery, Process ...
KLA Corporation
... control, Brightfield critical dimension (CD) Imaging-based overlay metrology system with a tunable light source for accurate, process robust, high productivity overlay error measurement of ≤7nm logic and advanced memory design nodes. Imaging-based ...
KLA Corporation
... IQC), CMP (chemical mechanical process) / polishing process control, wafer clean process control, epitaxy process control, substrate to epitaxy correlation, epitaxy reactor vendor comparison, process ...
KLA Corporation