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Linear Motion Rolling Guide technology nurtured in the company over the years and up-to date micro-electronics technology have been combined in this new series. The Precision Positioning Table incorporates IKO Linear Way Series which is used widely in applications for precision machines and machine tools, and takes full advantage of its superior characteristics. Electronic control devices are specially prepared in series to achieve the best performance of the tables so that a well balanced total system including a drive system and electronic control devices can be completed.IKO Mechatronics Series is expected to serve as indispensable components for automation an unmanned control machines. We will now introduce Mechatronics Products created by our original technology.
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For applications with high loads, particularly torque loads, our AXLT line of linear tables offer outstanding solutions. In order to be able to optimally utilise the potential of the linear motion and drive systems, all sizes are also available with a steel base plate.
The integrated ball screw guarantees accurate sequences of movements even at the highest loads. Two parallel THK linear motion guides ensure that high load torques can be taken up. All internal components such as the screw-type drive, linear motion system and switch are protected against external influences by a bellows available as standard.
Fixing
Depending on installation position and size, the structure of their base plates mean that our linear tables can be screwed tight from below with the sliding block, or from above.
Limit stop
A choice of an internal inductive proximity switch or an externally mounted mechanical limit switch is available as a limit stop.
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For three decades Velmex manual and motorized UniSlide Assemblies have been the preferred method to produce linear and rotational motion in scientific, research, machine, instrument and industrial applications. Hundreds of thousands of UniSlides are in use providing simple, rugged, reliable motion. UniSlide applications are limited only by your imagination. For measurement, alignment, inspection and QA/QC, optical focusing, antenna alignment, film and animation work, medical and biological analysis, for moving probes, sensors, components, and thousands of other uses—if you need precise, versatile movement in one, two or three dimensions, with linear or rotational motion, you can do it more efficiently and less expensively with a Velmex UniSlide.
UniSlides are available in nearly 1000 standard manual or motorized configurations, including free sliding models, screw drive versions, models with micrometer position readout in English or Metric calibrations, rapid advance models, in standard and high precision accuracy. An impressive array of products. But the real versatility of UniSlides is their amazing flexibility.
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Our linear tables are distinguished in particular by their high accuracy combined with sturdiness. Selected junction roller guides and prestressed, backlash-free ballscrews contribute to highest standards of positioning accuracy. Our own optimized production technology as well as in-house assembly warrant operational precision standards that even penetrate the realms of air-bearing technology. For example, our LT5-LxxA is geared to maximum levelness and linearity deviation of 1µm over the entire stroke of 100 mm.
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Aerotech manufactures a large selection of linear tables/slides/stages that utilize our own brushless linear direct-drive servomotors, as well as ball screw models driven with Aerotech brush or brushless rotary motors. Travels for our linear tables range from 25 mm to 1.5 meters. Aerotech's tables are utilized in high-performance applications in industrial robots, fiberoptics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, electronic manufacturing, and other industrial automation applications. In addition, Aerotech manufactures drives and motion control solutions that perfectly complement our linear tables.
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Constructed of hard coat anodized, aluminum dovetail ways and PTFE bearings, XSlides are suitable for either incrementing or scanning applications, XSlides have a load capacity of 35 lbs.(15.9 kg.) horizontally and 10 lbs. (4.5 kg.) vertically. Straight-line accuracy is 0.001"/10” (0.076 mm/25 cm). Repeatability is 0.0001 inch (0.00025 mm).
With a cross-sectional profile of 1.88"(48 mm) by 1.22"(31 mm), the XSlide comes in eight travel lengths from 2" (5 cm) to 30"(75 cm). Each slide includes integrated limit switches and will accept either NEMA 17 or NEMA 23 motors. Maximum input shaft speed is 30 revs/sec.
XSlide’s can be easily secured and configured as multiaxis systems using mounting cleats. Durable XSlides have a five year limited warranty and are available as individual components or complete automation solutions including, motors, controllers and supporting framework.
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ALIO Industries engineers and manufacturers nano resolution linear stages for stand alone motion systems or stackable axes in various serial kinematic structures. The standard stages can be modified or re engineered to meet customer needs plus these products can be interfaced to existing customer controllers or ordered with motion controllers and GUI software. Stages are available for end-user and OEM applications in atmospheric, clean room and vacuum environments requiring ultra clean, extremely precise movement with high reliability.
ALIO's approach to the linear stage world was to build the best metal structure possible with design and manufacturing then find and integrate the high quality and precision component found in the world market.
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A broad choice of linear table on trees of precision or ball guide of precision, with drive by trapezoidal screw or ball screw.
Series SLTL-G: Linear tables drive by ball screw on rails and shoe of guidance,
Series SMLS-TR: Count with drive by trapezoidal screw on tree of precision,
Series SLMS-VB: Count with entrînement by ball screw on tree of precision,
Series FSKBO-TR: Count supported with drive by trapezoidal screw on tree of precision,
Series FSKBO-VB: Count supported with drive by ball screw on tree of precision,
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- Travel to 1800 µm
- Compact piezo stage design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
P-620.1CD - P-629.1CD PIHera® piezo stage systems are flexure guided nanopositioning linear slides featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range).
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DSM's FPA-2000E FlexFrame PiezoActuator(TM) provides precision motion control and positioning capabilities. The FPA-2000E is a flexure-guided piezoelectric actuator ideal for both dynamic and static applications where precise and accurate positioning is required. The FPA-2000E is available as a standard product with low voltage (150V) piezo material. The piezo actuator incorporates a preload for bi-directional motion and a titanium or stainless steel mechanical amplification structure.
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All XY Stages have a flat assembly height of less than 50 mm and a free aperture for applications with transmitted light, aperture which can be closed by an insert plate. The user can choose between continuously adjustable hall and mechanical limit switches. Even when using complete travels, all mechanical parts are protected against dirt. Basic components such as base plate and carriage are made of high-strength aluminium. A black anodized coating protects the surface and makes it reflection-poor for all applications in the field of photonics. Optionally, the XY Stages for the Life Science field are available as light anodized versions. Thus, smallest samples or impurities on the surface are easily visible.
The XY Stages are available with travels of 50, 70, 100 and 130 mm. The dimensions of the square aperture correspond to the travels of the XY Stages respectively. Powerful step and DC servo motors are used as drives. All versions of the XY Stages can be mounted to complete systems together with the new position controls PS 30 and PS 90 as well as the comfortable operating interface OWISoft.
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Open Cross-Tables
In the field of microscopic optics, the open cross-tables in the KT series are mainly used as two-axis stage precision positioning units. The open form of design enables an object to be illuminated from underneath. The scope of delivery includes a plane-parallel glass plate. The drive concept is a modular design, thus facilitating individual configuration the meet the specific needs of the user.
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The ATT185 series precision tilt (pitch-roll) tables provide a means for leveling instruments or tilting components over a ±10° range. Aerotech's patented sub-arc-second resolution drive allows the user to cover the total angular range quickly while maintaining a resolution of 0.2 arc-second for the ATT185-3, and 0.1 arc-second for the ATT185-5. With this unique drive, the tables exhibit virtually no creep or backlash and have excellent repeatability. These tables have a gimbal support with decoupled and orthogonal axial motion.
Both tilt table bases have clearance holes for M6 screws on 25 mm centers and are adaptable to Aerotech linear or rotary translation stages. The tables are constructed of aluminum with a black anodized finish.
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The MVT 40C XYZ has been optimized regarding its flat form and is alternativly available with fine adjustment screws or with micrometers. The backlash is minimized through the spring return.
- for use with SYS 40
- special aluminium alloy for high dimensional stability, black anodized
- mountable on slides and pins
- self-locking
- flat design
- low mass
Positioning systems are the economic solution for applications, where simple but precise motion sequences have to be realized.
Due to the manifold combination possibilities of linear, rotary, angular adjustment and tilt stages, goniometers as well as fine-thread and micrometer screws in the most different specifications, a large application area is covered.
Adapter plates allow additional assembling possibilities. Therefore, a multitude of applications is possible, also beyond the standardized system heights of 40 mm, 65 mm and 105 mm.
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MICOS is presenting several motorized micrometers in different qualities. The new MP15 is designed for precision low- cost applications: a finepitch screw motorized by a small DC or stepper motor enable travel of 6,5 or 13 mm. Two integrated endswitches and different adapters like M6 or dia 9,5 mm are giving the chance to motorize your manual stage or mirror mount. For more precise applications you can get our MP20L series which is designed with ballscrew, For higher forces a trapeziodal soindle driven pusher is designed, our MA35. For closed loop our nan-pusher NP40 is the selection choice.
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With its new structural shape the HPS-170 is especially developed to meet high positioning demands. Due to its precise and smooth operation this linear stage is perfectly suited for measuring and inspection equipment. All important parts are made of a special, tempered Al-alloy which guarantees a longtime stability. The Precision Stage HPS-170 is available with a DC,- or 2-phase-micro step (SMC-series) motor. Two limit switches are firmly integrated in the precision stage. Optionally the precision stages can be equipped with a linear encoder which guarantees a resolution of 0.1 µm. Optical and inductive limit switches as well as test and calibration certificates can be supplied on request.
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The NEW Rotation Stage DT-80 R rotation stages of the 80 structural series are a low cost alternative to the MICOS DT-65 N and PRS-110 high precision rotation stages. They are mainly applied for simple positioning tasks and enlarge the range of our low cost translation stages of the 80 structural series. The belt driven DT-80 R rotation stage allows a much higher speed of rotation in comparison to other stages. The continuous aperture of 40 mm diameter is suitable for many applications in the range of microscopy. The belt driven combination is prestressed with nearly zero backlash and produces a smooth move. Structural series 80 rotation stages are directly driven by 2-phase micro-step (SMC-series) or MICOS SMC Pollux motor- controller combination. DT-80 R rotation stages are equipped with reference switches (HLS).
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The RV Series rotation stages provide high-precision angular positioning accuracy combined with high load capacity. There are five stage sizes and six drive configurations available, optimizing load capacity, torque, speed and resolution for a variety of operating conditions.
All RV stages are constructed of tool steel, with rotation accuracy ensured by ground bearing surfaces. A double row of preloaded bearings allows for high off-center loads in a reduced footprint. The single monolithic design offers improved stiffness without compromising dynamic performance. The largest RV stage can bear up to 6500N or rotate up to 80 °/s, while maintaining less than 4 um eccentricity.
Precise rotation is ensured by a precision ground and hardened worm gear. A rotary encoder mounted on the worm gear shaft provides 0.001° position feedback resolution (0.00025° resolution with RVS80CC) on the standard configurations. For more demanding applications, the HAT and HAHLT options are available on the RV120 to RV350 models. These stages are equipped with a direct reading optical encoder attached to the moving platen for superior resolution and accuracy.
The selection of the drive configuration should be based on the precision and speed requirements relative to the inertia of the payload.
• Precision 80–350 mm diameter rotation stages
• Monolithic design ensures high structural stiffness
• Ideal for high-load application
• High-accuracy versions with direct reading encoder and better than 0.0001° (0.36 arcsec) resolution
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Rotary Measuring Stage DMT 130
This precision rotary stage allows unlimited azimuth at resolutions of less than one angular minute. It is suitable for horizontal and vertical rotational axes.
The precision ball bearing and the worm gear are preloaded.
The rotary stage DMT 130 is available with different motors.
All aluminium parts have a top quality black anodised protective coating.
- deformation-resistant aluminium alloy
- precision angular contact ball bearing
- preloaded worm gear
- rotary table with aperture
- electronical reference switch (Hall-effect)
- with step motor or DC servo motor
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The SpaceFAB SF-3000 LS is low cost alternative to MICOS SpaceFAB SF-3000 LS and is especially designed for simple tasks of positioning. With one SpaceFAB SF-3000 LS all six degrees of freedom can be moved without additional positioning elements. SpaceFAB SF-3000 LS was especially developed for easy alignment applications. Furthermore SpaceFAB SF-3000 LS is perfectly designed for micro-fabrication and bio-genetic. The core software used for the SpaceFAB SF-3000 LS is the MICOS Motion Server. The Motion Server includes all the mathematical transformations so that the user can start movements directly by specifying the six coordinates x, y, z, Rx, Ry and Rz. It is also possible to move arbitrary trajectories in a contouring mode. The Motion Server can be used as a stand alone software or in combination with MICOS or selfmade applications. These applications can be written in any modern programming language, the communication is done with TCP/IP. For motion sequences, a recipe editor is also available.
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D E S C R I P T I O N
Micro Stages MT-55 are especially suited for the integration in difficult accessible places and limited space conditions. MT-55 can be employed for precise and high-resolution positioning of small construction parts such as fibres, optics and laser diodes. MT-55 can be assembled without problems to XYZ-modules. MT-55 is equipped with zero-backlash ball screws and precision lead screw with 0.25 mm pitch. The Micro Stage MT-55 is driven by a zero-backlash toothed belt and DC-, or 2-phase-step motor with zero-backlash gear. Quiet smooth move and highest resolution up to 0.0137µm is guaranteed (SMC). The travel range is 5 mm. MT-55 is provided with a center hole of 15 mm diameter, so it is well suited for all tasks of microscopy. Two limit switches prevent damage from accidental overtravel. The XY-assembly can only be made at plant and must be indicated when ordering. (Code: 6219-9-X20).
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- Unique Design: Both Piezo Stage and Piezo Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 nm Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Piezo Drives
- ID-Chip for AutoCalibrate Function
- Vacuum Versions Available
The P-753 LISA (Linear Stage Actuators) high-speed piezo stage nanopositioners can be used both as linear actuators or as translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely low tip/tilt error.
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Miniature Translation Stage MVT 40B XYZ
The miniature translation stages 40B is equipped with a bidirectional working fine adjustment screw witch can take forces from any direction. With the scale knob a fine adjustment is possible. The stages uses adjustable dovetail guides. Mounted on slides RT 40, the system height of the SYS 40 is reachable. SYS 65 on request.
- for use with SYS 40
- special aluminium alloy for high dimensional stability, black anodized
- mountable on slides and pins
- self-locking
- compact design
- low mass
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Parker''s MX80L Miniature Stage, the smallest linear servo-motor driven positioner in the industry, is redefining high throughput automation in the world of miniature positioners. The MX80 is a high performance linear servo motor stage designed to meet today''s 24/7 production demands requiring rapid-fire positioning of light loads within a small work envelope.
The MX80S low profile miniature positioner offers reliable linear positioning for space restricted applications. It can be driven by a 2mm lead precision ground ballscrew or a high efficiency PTFE coated leadscrew offered with 1mm, 2mm, and 10mm leads and can be driven by either a servo or stepper motor. The MX80S can include digital limit/home sensors and is offered with an attractive black anodize finish or can be provided with a clean room preparation.
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- Smallest Linear Slide with High-Speed Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 nm
- Self-Locking
- XY-Combinations Available
- 20,000 h MTBF
- Vacuum Versions to 10-7 hPa
PILine® - Ultimate Motion in the Smallest Package:
PILine® M-661- and M-662-series piezo motor linear slides are the smallest high-speed piezo-motor-driven translation stages currently available on the market.
Working Principle:
M-661 and M-662 linear stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-661 piezomotor drive can provide accelerations of up to 20 g and velocities of 500 mm/s and more, together with high resolution and holding force. Because the ceramic stator is pressed against a slider of the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash.
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Velmex now offers a comprehensive line of Precision BiSlide® Assemblies for engineers to do positioning, scanning, and automated assembly.These slides have dual 45 degree opposing “V” ways to provide high rigidity in all directions. The carriage moves on low friction PTFE compound bearings (coefficient of friction: 0.09), which are fully adjustable to customize pre-load. The 3.4" W x 2.15" H hard coated aluminum 6063 T6 extrusion “I” beam base design optimizes strength to weight. This simple but rugged design produces a high value product. External base T-slots enable multi-axis configuration without adapter plates or brackets. For large bulky loads, dual tandem and open frame configurations are available. BiSlides can be motor driven (NEMA 23 and 34 motors). Stock units have travel ranges from 5" to 85". Load capacity is 300 lbs. Repeatability is 0.0002"; straight line accuracy is 0.003" over entire travel distance. Lead screw pitches are 0.1", 0.4" and 2 mm; screw lead accuracy is 0.003"/10" (0.076 mm/ 25 cm). Durable BiSlides have a five year limited warranty and are available as individual components or complete automation solutions including, motors, controllers and supporting framework. Standard units are shipped in five days.
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Single Bearing Positioning Stage - LSS series
The single bearing positioning stage features lightweight moving parts for higher acceleration of light loads; it is designed for long-stroke closed position loop servo applications.
Extruded Positioning Stage - LSX series
This positioning stage features lightweight moving parts for high acceleration of light loads; it is designed for long-stroke closed position loop servo applications.
Enclosed Positioning Stage - LSE series
The enclosed positioning stage provides high acceleration of heaver loads; it is designed for applications with one or more axes. To provide a variety of forces, the LSE is available with either brushless iron core, cog-free, brushed DC and AC induction motors. Linear X-Y-Z Gantry - LSG series
Baldor's linear gantry stage is designed to speed up and simplify the building of high throughput, precision positioning systems. The LSG provides a clean, very compact design compared to conventional gantry systems base upon rotary components and ballscrews; it is ideal for applications where space is at a premium.
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High-Precision Linear Stages LIMES 122
The high-precision linear stages of the LIMES 122 series are characterized by high precision, which is necessary for demanding R&D applications. Due to their suitability for continuous operation, the LIMES linear stages are the appropriate choice for industrial applications as well. The special guides provide backlash-free motion as well as high load capacity. The ball screw is preloaded and ensures high precision movement as well as a high life time. All aluminium parts have a top quality black anodized protective coating.
- series of high-precision linear stages made of high strength aluminium alloy
- travel up to 260 mm
- backlash-free ball screw
- carriage with preloaded recirculating ball bearings
- stainless, ground guides
- high precision limit switches (Hall-effect), mechanical or inductive limit switches
Options
- brake
- linear measuring system (accuracy class ±3 µm/m, resolution 0.1 µm)
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Positioning and micro-positioning tables
