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Linear Motor Table LT is a direct drive positioning table featuring a low sectional height and light weight. An AC linear servo motor and an optical linear scale are compactly integrated in the moving table and bed made of aluminum alloy, and miniature type linear motion rolling guides IKO Linear Way L are assembled in the table guide section. Linear Motor Table LT, adopting a C-shaped magnet yoke arranged in-between two stator magnets together with a moving coil, provides large driving force and achieves high speed and quick response positioning. Linear Motor Table LT is most suitable for applications requiring high speed operation such as semi-conductor and liquid crystal related equipment, measuring instruments, assembling systems, material transfer equipment.
Features:
Maximum thrust 900N for high thrust series
Compactness and high thrust were pursued by adopting miniature optical linear scale and C-shaped magnet yoke. Maximum thrust 900N is achieved by high-density coil arrangement. Also, compact series output 450N with the total height only 40mm
High acceleration and high response with a smooth motion
High acceleration and high response positioning can be made due to super light weight moving table and high thrust. The table can travel with a smooth motion by using C-shaped magnet yoke which cancels out magnet forces and eliminates the unnecessary load on the linear motion rolling guides. Also, C-Sleeve Linear Way, long term maintenance free type, is adopted for their linear motion rolling guides.
High resting stability and speed stability
High resting stability is achieved by the latest servo technology. This linear motor can be used as a high accurate positioning device. Also, high speed stability is achieved.
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The SR stage is a compact, small footprint, open type positioning stage. It is used in closed loop positioning applications that require high speed and high accelerations of lighter loads.
The ironless core coil assembly has no magnetic attractive force to the stationary magnet assembly, which reduces the load on and increases life of the bearing system.
The low overall weight of the stage makes it ideal as a Y axis (top axis) in a multi-axis system. The lower moving mass of the stage allows for much higher accelerations of light payloads.
The cable carrier is oversized to allow for passage of customer payload cables and hoses. The back of the cable carrier can be easily removed and reattached to route through additional cables.
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T-LSM Series Miniature Motorized Linear Stages
* 25 to 200 mm travel (custom options available)
* Built-in controllers
* Very compact with high speed, thrust and accuracy
* Mount in XYZ configuration without any additional hardware
* Several units daisy-chain to a single serial port
Description
Zaber's T-LSM series devices are computer-controlled motorized linear stages with high thrust and speed capabilities and a very compact size. They are stand-alone units requiring only a standard 15V power supply. A potentiometer knob at the end of the unit permits smooth manual control; turn it fully to get maximum speed. These slides connect to the RS-232 port of any computer and can be daisy-chained with up to 254 units per chain. They can also be chained with any other T-Series products. Convenient 6-pin mini din cables on the unit allow for direct interconnection between units in close proximity. For longer distances, a standard cable extension can be used.
At only 21 mm high, these miniature stages are excellent for applications where a small profile is required. The T-LSM's innovative design allows speeds up to 8 mm/s and loads up to 10 kg. Like all Zaber's products, the T-LSM series is designed to be 'plug and play' and very easy to set-up and operate. If you are considering a multi-axis system, in the XY configuration these stages make excellent microscope stages. Adding a T-JOY3 Joystick Controller allows manual control of both x and y or xyz axes from a single interface as well as allowing microscope stage positions to be saved and recalled at the touch of a button.
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With its Ball Rail Tables TKK and TKL, Rexroth offers ready-to-install solutions for linear motion applications with high rigidity requirements. The base plate of the ball rail tables is made from machined aluminum profiles or steel with reference edges. Integrated in this rigid axis are Rexroth ball rail systems with four long runner blocks per carriage. These can be driven
by ball screws (TKK) or linear motors (TKL).
To achieve the most economical solution for each specific application, Rexroth also provides matching side drive timing belts or motor mounts and couplings, as well as various motor-controller combinations.
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The standard program of linear tables Movitec TV includes/understands 6 sizes of width 100,150,200,250,300,400 Misters These systems are conceived according to a modular principle they have a very vast choice of guidance and drive per screw (with balls with satellite rollers...).
The linear tables miniature of series LV 50,75,100 are manufactured out of aluminum but also in steels inoxidables, the components and materials used for the construction of these tables make of it a very rigid and robust product, resistant to the strong requests and being integrated in extremely reduced spaces.
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Linear Motion Rolling Guide technology nurtured in the company over the years and up-to date micro-electronics technology have been combined in this new series. The Precision Positioning Table incorporates IKO Linear Way Series which is used widely in applications for precision machines and machine tools, and takes full advantage of its superior characteristics. Electronic control devices are specially prepared in series to achieve the best performance of the tables so that a well balanced total system including a drive system and electronic control devices can be completed.IKO Mechatronics Series is expected to serve as indispensable components for automation an unmanned control machines. We will now introduce Mechatronics Products created by our original technology.
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For applications with high loads, particularly torque loads, our AXLT line of linear tables offer outstanding solutions. In order to be able to optimally utilise the potential of the linear motion and drive systems, all sizes are also available with a steel base plate.
The integrated ball screw guarantees accurate sequences of movements even at the highest loads. Two parallel THK linear motion guides ensure that high load torques can be taken up. All internal components such as the screw-type drive, linear motion system and switch are protected against external influences by a bellows available as standard.
Fixing
Depending on installation position and size, the structure of their base plates mean that our linear tables can be screwed tight from below with the sliding block, or from above.
Limit stop
A choice of an internal inductive proximity switch or an externally mounted mechanical limit switch is available as a limit stop.
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For three decades Velmex manual and motorized UniSlide Assemblies have been the preferred method to produce linear and rotational motion in scientific, research, machine, instrument and industrial applications. Hundreds of thousands of UniSlides are in use providing simple, rugged, reliable motion. UniSlide applications are limited only by your imagination. For measurement, alignment, inspection and QA/QC, optical focusing, antenna alignment, film and animation work, medical and biological analysis, for moving probes, sensors, components, and thousands of other uses—if you need precise, versatile movement in one, two or three dimensions, with linear or rotational motion, you can do it more efficiently and less expensively with a Velmex UniSlide.
UniSlides are available in nearly 1000 standard manual or motorized configurations, including free sliding models, screw drive versions, models with micrometer position readout in English or Metric calibrations, rapid advance models, in standard and high precision accuracy. An impressive array of products. But the real versatility of UniSlides is their amazing flexibility.
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Linear cross table 2D-24-1054-550 based on linear synchronous motors LSMA-T-24-275
Cross table consists of two axis X and Y on base linear synchronous servomotors, built in aluminium profiles with roller guideways and glued measuring tape of magnetical encoder.
Axis Y is mounted on top of carriage of axis X with screws and two locating pins
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With its Ball Rail Tables TKK and TKL, Rexroth offers ready-to-install solutions for linear motion applications with high rigidity requirements. The base plate of the ball rail tables is made from machined aluminum profiles or steel with reference edges. Integrated in this rigid axis are Rexroth ball rail systems with four long runner blocks per carriage. These can be driven
by ball screws (TKK) or linear motors (TKL).
To achieve the most economical solution for each specific application, Rexroth also provides matching side drive timing belts or motor mounts and couplings, as well as various motor-controller combinations.
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Rotary-linear tables are combinations of the proven rotary table series
FIBROTAKT,
FIBRODYN,
FIBROPLAN,
FIBROMAX or
FIBROTOR
and one linear axis
in various versions and designs
Transport loads up to 100t
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Aerotech’s new PRO165LM linear stages are built for high throughput high precision, industrial positioning
• Low cost stage builds on well proven hard top & side sealed design
• Linear motion guide bearings, direct-drive linear motors and high resolution linear encoders make for exceptionally high reliability and long life time positioning systems
Aerotech has launched a new range of high precision linear positioning stages for high throughput industrial production and test applications. The low-cost PRO165LM series features and improves upon Aerotech’s time-tested hard-top and side sealed stage design with a powerful direct-drive brushless linear motor, micron level linear encoder feedback and long-life linear motion guide bearings for extremely smooth motion and exceptional servo system sensitivity.
With a nominal width of 165 mm and ten travel range options from 100 mm to 1 metre, the new stages can handle payloads up to 45 kg, speeds to 2 m/sec and acceleration to 3g with sub-micron level repeatability. Available in standard accuracy grade to ± 4 microns or with Aerotech’s certified HALAR option to ± 1.5 microns, the PRO165LM series is aimed at challenging applications such as laser processing and MEMS micromachining where superior manufacturing quality, rapid production throughput, long service life and low maintenance are of primary importance.
A choice of standard linear encoders includes 0.1 micron line driver or amplified sine output alternatives to provide a practical system resolution down to 250 nanometres. Aerotech’s cog-free brushless servomotors provide exceptionally high force output combined with very smooth motion and excellent in-position stability. Matched performance servo drives with ±320 VDC bus voltages are available across Aerotech’s range of motion controllers.
Sealed linear motion guide bearings and a high stiffness base plate system help to guarantee the load handling capability, the rigidity and the long service life capability of the PRO165LM series. MTBF life is specified at 20 000 hours across the range.
The rugged Teflon® impregnated tabletop and hard top way cover provides full protection from hot sparks and machining debris, and tensioned side straps effectively seal the internal bearing system, motor and encoder. The hard top sealing system has been used extensively across Aerotech’s range of linear positioning stages and has proven to be much more effective that bellows type stage sealing.
The PRO165LM series can be supplied in X-Y, XZ or YZ configurations with orthogonality certified to 5 arc-secs. The versatility built into the stage design includes a selection of tabletop plates that include mounting patterns with steel inserts for Aerotech ADRS and AGR series rotary stages as well as standard metric (or inch) plates. All stage travel and mounting configurations have a chain type cable management option for ease of installation into the customers’ system.
To complement the performance of the PRO165LM series stages, Aerotech manufactures a wide range of advanced motion controls and servo amplifiers. The A3200 Digital Automation Platform is a Windows™ based software-only controller for up to 32 axes of Firewire® interfaced high performance motion and machine control and includes optional HMI, PLC and vision control modules. It is programmable in a choice of languages including powerful .NET, RS-274 G-code, high level AeroBASIC™ or optional LabVIEW™.
The A3200’s distributed control architecture delivers fully deterministic motion updates to Aerotech’s Ndrive® servo drives that process motion and I/O commands at bandwidths up to 20 KHz. Additional Ethernet 10/100 Base T interfaced third party I/O and PLC’s may be added to Ndrives for further system expansion.
The PRO165LM is also available for use with Aerotech’s multi axis Ensemble™ Epaq - a desktop or 19 inch rack mounted system with integral linear or PWM stage amplifiers, or stepper drives and a full complement of machine I/O. It is capable of controlling up to 6 axes of motion and machine control internally with the possibility of adding a further three external drives. For single axis applications, Aerotech’s Soloist™ can provide high performance motion control with integrated servo drive and the possibility for Ethernet based multi-axis control.
Aerotech motion systems are delivered fully tested with all motor power and encoder cables plus performance and calibration related documents. For straightforward commissioning, a delivery pack with interconnection drawings and all motor parameter set-up data for the system is provided along with product training and comprehensive on-line technical support.
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Aerotech manufactures a large selection of linear tables/slides/stages that utilize our own brushless linear direct-drive servomotors, as well as ball screw models driven with Aerotech brush or brushless rotary motors. Travels for our linear tables range from 25 mm to 1.5 meters. Aerotech's tables are utilized in high-performance applications in industrial robots, fiberoptics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, electronic manufacturing, and other industrial automation applications. In addition, Aerotech manufactures drives and motion control solutions that perfectly complement our linear tables.
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Constructed of hard coat anodized, aluminum dovetail ways and PTFE bearings, XSlides are suitable for either incrementing or scanning applications, XSlides have a load capacity of 35 lbs.(15.9 kg.) horizontally and 10 lbs. (4.5 kg.) vertically. Straight-line accuracy is 0.001"/10” (0.076 mm/25 cm). Repeatability is 0.0001 inch (0.00025 mm).
With a cross-sectional profile of 1.88"(48 mm) by 1.22"(31 mm), the XSlide comes in eight travel lengths from 2" (5 cm) to 30"(75 cm). Each slide includes integrated limit switches and will accept either NEMA 17 or NEMA 23 motors. Maximum input shaft speed is 30 revs/sec.
XSlide’s can be easily secured and configured as multiaxis systems using mounting cleats. Durable XSlides have a five year limited warranty and are available as individual components or complete automation solutions including, motors, controllers and supporting framework.
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NB4 linear stages are designed for a variety of applications in research and other industrial areas requiring precision positioning such as in semiconductor processing, fiber optics manufacturing and biotech automation.
For more reliability and durability, the guide rods and leadscrew are protected with a strong machined cover and the encoder is mounted internally directly to the leadscrew rather than being exposed to shock and contamination when mounted in the rear of the motor.
All NB4 series linear stages are machined from 6061 aluminum alloy to provide a light yet stiff and stable stage.
The drive system utilizes a stainless steel ACME leadscrew with internally lubricated plastic drive nut. The drive nut offers zero backlash operation that automatically adjusts for wear to insure zero backlash for the life of the stage.
The use linear guide rods provide a smooth motion. Since the carriage is supported over the entire travel of the stage, a good cantilevered load capacity can be achieved.
Separate connectors for motor power and limit/encoder signals are provided for ease of operation. Integrated limit switches and a high torque size 17 stepper motor are supplied as standard items.
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Stages are designed for motion systems that require both high dynamics and high repeatability.
Construction: Stage consist of linear motor built on aluminium profile with linear guideways, and measuring system (magnet encoder) The linear motor consist of forcer with electromagnetic modules and magnet way. The magnet way is fixed on the aluminium profile. The forcer is assembled on the carriage that is destined for installation of user's mechanisms or for joining in more complexity coordinate system.
Advantages:
1. Complete solution for one-axis travel
2. Direct drive (gearless) guarantee backlash-free and smooth (without vibration) motion for long distance
3. High dynamics, accuracy and resolution.
4. Maximum stroke up to 8 m.
5. Modular structure, easy assembling several stages to gantry system.
6. Built-in position encoder.
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A broad choice of linear table on trees of precision or ball guide of precision, with drive by trapezoidal screw or ball screw.
Series SLTL-G: Linear tables drive by ball screw on rails and shoe of guidance,
Series SMLS-TR: Count with drive by trapezoidal screw on tree of precision,
Series SLMS-VB: Count with entrînement by ball screw on tree of precision,
Series FSKBO-TR: Count supported with drive by trapezoidal screw on tree of precision,
Series FSKBO-VB: Count supported with drive by ball screw on tree of precision,
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DSM's FlexFrame PiezoActuator™ products are flexure-guided piezoelectric actuators that use lever mechanisms to mechanically amplify the motion of piezo ceramics.
The flexures in each mechanism are designed to provide stable motion guidance and to minimize the resistance that the frame might impart to the piezoelectric actuation. DSM designs the flexures to stay within the material's fatigue limit under standard operating conditions.
DSM's FPA-2000E FlexFrame PiezoActuator(TM) was developed to satisfy requirements in wafer positioning for the semiconductor fabrication industry. The piezo actuator incorporates a preload for bi-directional motion and a titanium or stainless steel mechanical amplification frame.
See the complete family of standard FPA designs at the associated Web link. Custom inquries are welcome, and we simply ask "What 'mission critical motion control' requirement can we help you with?"
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- Travel to 1800 µm
- Compact piezo stage design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
P-620.1CD - P-629.1CD PIHera® piezo stage systems are flexure guided nanopositioning linear slides featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range).
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XY Series Multi-Axis Systems
* 13 x 13 mm to 450 x 450 mm travel
* Built-in controllers
* Several units daisy-chain to a single serial port
* Available in various speed / resolution options
Description
Zaber offers motorized stages that can be assembled into many different configurations of XY, XYZ and XYZ/rotation. We list a few common XY combinations here, but you can select your own combination of family, travel and lead screw pitch in each axis to build the stage you need. We ship multiple stages un-assembled to avoid damage to the moving parts. Our families of linear stages are listed below. Please refer to the individual product family web page for specifications.
T-LSM Miniature Linear Slides:
* 25 to 200mm travel
* 10 kg max payload
* 25N max thrust (vertical axis payload)
* Mounts directly in XY and XYZ
* Our most compact design
T-LS Linear Stages:
* 13 and 28mm travel
* 10kg max payload
* 15N max thrust (vertical axis payload)
* Mounts directly in XY
* Requires AB90 angle bracket for Z axis mounting
* Can be combined directly with T-LSR stages
T-LSR Linear Slides:
* 75 to 450mm travel
* 20kg max payload
* 100N max thrust (vertical axis payload)
* Mounts directly in XY and XYZ
* Can be combined directly with T-LS stages
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The ATT185 series precision tilt (pitch-roll) tables provide a means for leveling instruments or tilting components over a ±10° range. Aerotech's patented sub-arc-second resolution drive allows the user to cover the total angular range quickly while maintaining a resolution of 0.2 arc-second for the ATT185-3, and 0.1 arc-second for the ATT185-5. With this unique drive, the tables exhibit virtually no creep or backlash and have excellent repeatability. These tables have a gimbal support with decoupled and orthogonal axial motion.
Both tilt table bases have clearance holes for M6 screws on 25 mm centers and are adaptable to Aerotech linear or rotary translation stages. The tables are constructed of aluminum with a black anodized finish.
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Translation System
Micrometer drive
High sensitivity
15mm travel in X, Y and Z axis
Specifications
Travel range 15 mm
Sensitivity 1 µm
Tracking accuracy 2 µm
Scale graduation 10 µm
Load capacity 5 kg
Weight 1.85 kg
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The RV Series rotation stages provide high-precision angular positioning accuracy combined with high load capacity. There are five stage sizes and six drive configurations available, optimizing load capacity, torque, speed and resolution for a variety of operating conditions.
All RV stages are constructed of tool steel, with rotation accuracy ensured by ground bearing surfaces. A double row of preloaded bearings allows for high off-center loads in a reduced footprint. The single monolithic design offers improved stiffness without compromising dynamic performance. The largest RV stage can bear up to 6500N or rotate up to 80 °/s, while maintaining less than 4 um eccentricity.
Precise rotation is ensured by a precision ground and hardened worm gear. A rotary encoder mounted on the worm gear shaft provides 0.001° position feedback resolution (0.00025° resolution with RVS80CC) on the standard configurations. For more demanding applications, the HAT and HAHLT options are available on the RV120 to RV350 models. These stages are equipped with a direct reading optical encoder attached to the moving platen for superior resolution and accuracy.
The selection of the drive configuration should be based on the precision and speed requirements relative to the inertia of the payload.
• Precision 80–350 mm diameter rotation stages
• Monolithic design ensures high structural stiffness
• Ideal for high-load application
• High-accuracy versions with direct reading encoder and better than 0.0001° (0.36 arcsec) resolution
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Rotary Measuring Stage DMT 130
This precision rotary stage allows unlimited azimuth at resolutions of less than one angular minute. It is suitable for horizontal and vertical rotational axes.
The precision ball bearing and the worm gear are preloaded.
The rotary stage DMT 130 is available with different motors.
All aluminium parts have a top quality black anodised protective coating.
- deformation-resistant aluminium alloy
- precision angular contact ball bearing
- preloaded worm gear
- rotary table with aperture
- electronical reference switch (Hall-effect)
- with step motor or DC servo motor
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For more than 30 years Newport has provided both research and commercial industries with an outstanding selection of manual translation stages. From top-of-the-line stainless steel crossed-roller bearing stages to economically priced dovetail stages, Newport has a manual translation component to fit most any application. In this section you will find a wide variety of linear stages, rotation stages, manual actuators, and integrated translation stages for fiber alignment applications. Newport also offers custom modification on its manual translation stages.
461/462 Series ULTRAlign™ Precision Integrated Crossed-Roller Bearing Linear Stages
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DSM's flexure-guided piezoelectric actuators and stages are linear actuators for precision motion control and positioning applications. Our piezo actuators can be custom designed for specific micropositioning, nanopositioning, and scanning application requirements including vacuum compatibility and non-magnetic environments.
The FlexFrame PiezoActuator™ product family uses solid-state flexures as pivot joints to provide smooth, stiction-free and backlash-free motion for critical positioning applications. FlexFrame products are lever mechanisms that mechanically amplify the output motion of piezoelectric elements. Piezo actuators require no lubrication, and because there are no internal components sliding on each other, there are no particulates generated from the actuator's motion.
The standard FPA series within the FlexFrame family offers linear travel ranges between 80µm and 2mm. The compact designs are well suited to many positioning applications and come standard in durable, non-corrosive stainless steel or titanium designs configured with mounting interfaces to match a customer’s requirements.
The actuator assemblies are mechanically preloaded to ensure bidirectional operation, thus providing increased resilience to mechanical loads when compared to non-preloaded actuators. The resulting mechanism provides high-stroke operation in an exceptionally small package.
We invite custom design inquiries. What "mission critical motion control" requirement can we help you with?
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- Unique Design: Both Piezo Stage and Piezo Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 nm Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Piezo Drives
- ID-Chip for AutoCalibrate Function
- Vacuum Versions Available
The P-753 LISA (Linear Stage Actuators) high-speed piezo stage nanopositioners can be used both as linear actuators or as translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely low tip/tilt error.
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Miniature Translation Stage MVT 40B XYZ
The miniature translation stages 40B is equipped with a bidirectional working fine adjustment screw witch can take forces from any direction. With the scale knob a fine adjustment is possible. The stages uses adjustable dovetail guides. Mounted on slides RT 40, the system height of the SYS 40 is reachable. SYS 65 on request.
- for use with SYS 40
- special aluminium alloy for high dimensional stability, black anodized
- mountable on slides and pins
- self-locking
- compact design
- low mass
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- Smallest Linear Slide with High-Speed Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 nm
- Self-Locking
- XY-Combinations Available
- 20,000 h MTBF
- Vacuum Versions to 10-7 hPa
PILine® - Ultimate Motion in the Smallest Package:
PILine® M-661- and M-662-series piezo motor linear slides are the smallest high-speed piezo-motor-driven translation stages currently available on the market.
Working Principle:
M-661 and M-662 linear stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-661 piezomotor drive can provide accelerations of up to 20 g and velocities of 500 mm/s and more, together with high resolution and holding force. Because the ceramic stator is pressed against a slider of the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash.
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Velmex now offers a comprehensive line of Precision BiSlide® Assemblies for engineers to do positioning, scanning, and automated assembly.These slides have dual 45 degree opposing “V” ways to provide high rigidity in all directions. The carriage moves on low friction PTFE compound bearings (coefficient of friction: 0.09), which are fully adjustable to customize pre-load. The 3.4" W x 2.15" H hard coated aluminum 6063 T6 extrusion “I” beam base design optimizes strength to weight. This simple but rugged design produces a high value product. External base T-slots enable multi-axis configuration without adapter plates or brackets. For large bulky loads, dual tandem and open frame configurations are available. BiSlides can be motor driven (NEMA 23 and 34 motors). Stock units have travel ranges from 5" to 85". Load capacity is 300 lbs. Repeatability is 0.0002"; straight line accuracy is 0.003" over entire travel distance. Lead screw pitches are 0.1", 0.4" and 2 mm; screw lead accuracy is 0.003"/10" (0.076 mm/ 25 cm). Durable BiSlides have a five year limited warranty and are available as individual components or complete automation solutions including, motors, controllers and supporting framework. Standard units are shipped in five days.
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Positioning and micro-positioning tables
