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- Optical Deflection to 100 mrad (~6°)
- 1.0 kHz Resonant Frequency with Mirror
- Closed-Loop Version for Higher Linearity
- For Mirrors up to 12.5 mm (0.5") Diameter
- 2 Fixed Orthogonal Axes with a Common Pivot Point
- Sensor Configuration for Excellent Temperature Stability
- Zero Friction Flexure Guides
S-334 piezo stage tip/tilt platforms are fast and compact units providing precise angular movements of a mirror around two orthog-onal axes. The tip/tilt range is 50 mrad with sub-µrad resolution. Highest stability and accuracy is available in closed-loop operation.
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Nano Linear Stage PT 30-5-MSI
The Nano Linear Stage has a piezo inertial drive. With a travel in the millimetre range and steps in the nanometer range, it is suitable for manifold applications. A built-on miniature measuring system enables highest positioning accuracy and repeatability. A reference point is included in the glass scale. The basic components of the linear stage are made of highstrength aluminium. Due to a black anodized coating, the surface is protected and reflexion-poor. In order to ensure a high load capacity and a long life time, two preloaded linear ball bearing guides are integrated. Several PT 30-5-MSI can be mounted together and build multiaxis combinations. Due to the highly flexible connecting cable, additional forces are reduced, leading to a precise positioning motion. For the mounting of the nanopositioners, the mounting plate NMP 50 is recommended. It is available as accessory. In order to operate the nanopositioners with measuring system, the nano position control NPS 03 has to be used. The complete system is pluggable and ready for connection.
- high power density on little space
- with build-on measuring system
- precise positioning in the nanometer range
- travel in the millimeter range
- particularly high load capacity due to the preloaded linear ball bearing guides
Option
- version for use in vacuum
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TRITOR series
highly compact design resulting in superior performance
accurate parallel motion through parallelogram design
high reliability due to solid state hinges
motion without mechanical play
high resolution in nm and sub-nm range
motion up to 400 µm
precision pin holes
applications:
optics, laser tuning, fiber positioning
micromanipulation, biology
scanning systems
vacuum and low temperature
The unique TRITOR elements are extremely compact but offer motions of up to 400 µm in all three axes. Parallel motion is achieved without mechanical play due to the mechanical design. As an option, integrated position control systems for overcoming the effect of hysteresis are available.
TRITOR elements can be easily combined with other mechanical positioning systems. They are well suited for many various applications reaching from optical research to OEM systems.
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Hexapod 6-Axis Precision Positioning Stage
6 Degrees of Freedom Nanopositioner
Integrated Alignment Routines for Optical Fibers,Collimators and I/O Chips
Parallel Kinematics with 6 Degrees of Freedom
0.033 µm Actuator Resolution
Repeatability 0.3 µm in Space
No Moving Cables for Improved Reliability, Reduced Friction
Better Dynamics, More Compact than Serial Kinematics Systems
For Scanning and Alignment
Cartesian Coordinate Control with Virtualized Pivot Point
Powerful Digital Controller with Open Source LabViewTM Drivers, DLL Libraries...
Choice of Optional Photometers
Optional PIMotion&Vision with Integrated Real-Time Image Processing
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Aerotech air bearings are perfect in semiconductor equipment, fiberoptics, photonics, and other critical industrial automation applications. Our air bearings incorporate an active preload on both vertical and horizontal surfaces. Opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in outstanding stiffness that is ideal for heavy or offset loading.
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Planar System SERIES XY
Key Features:
· Mounted face up or inverted
· Air bearings XY table
· Large travel area
· IntelLiCoder Linear Feedback
· XY Theta control is possible
· Lightweight platen construction
· Overlapping trajectories with multiple forcers
IntelLiDrives Planar XY table offers the unique capability to operate two axes of motion in one plane with one motor. These systems designed to replace conventional compounded XY table systems where one axis is being carried by another. As a result, with Planar XY table greater reliability and performance is realized through design simplification and elimination of wear-prone components.
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Planar Motors
XY movements on an air bearing through a planar-servo-stepping motor with integrated distance measurement. Can be operated above head and even in a vacuum.
Planar Servo Motors LMSP
The planar motors LMSP have integrated distance measurement sensors and work with position control (closed loop).
XY table
Closed loop thanks to integrated distance measurement
Stepping motor makes simple drive electronics possible
Air bearing free of wear
No externally measurable magnetic fields
Practically no heating up
Can be built in above head
Stator area up to 1000 x 1000 mm
Suitable for vacuums
Planar Motor LMPP
The planar motors of the LMPP series are suited for simple positioning without position control (open loop).
Inexpensive XY table
Stepping motor technology (2-phase)
Control electronics for stepping motors
Can be built in above head
Stator area up to 1000 x 1000 mm
Suitable for vacuums
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Aerotech photonics and fiberoptics nanopositioners are perfect for the high-volume manufacture of photonics and fiberoptics components and systems. Our fiberoptics positioning systems utilize Aerotech's own brushless linear servomotors for the maximum performance in the most compact package. We manufacture many models of drives and motion controllers to provide a complete fiberoptics and photonics manufacturing package that is virtually maintenance-free and available for 24/7 operation. Aerotech nanopositioners feature the highest closed-loop resolution available with up to six axes of coordinated motion.
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These stages feature exceptionally long life without the need of adjustment, lubrication or maintenance. The integration of a splined linear guide and leadscrew results in a torsionally stiff stage that can be operated in either a horizontal or vertical axis. These stages are ideal for: Pick-and-place, parts transfer, water jet cutting, laser cutting and laser etching, inspection, testing, packaging, and assembly applications. Designed for loads up to 100 lbs. (45 Kg) and speeds to 30 in/sec. (762 mm/sec) the stages can be specified in compound multi-axis configurations such as an X-Y-Z axis gantry robot. To suit the requirements of an application a variety of stepper motors, DC brush and brushless motors, or AC motors can be mounted to the stage. Options to enhance performance and ease integration into a new or existing application are: Custom drilled and/or tapped holes in the stage and/or carriage, end of travel limit switches which can disable the amplifier, linear encoder, cable carrier, and protective bellows.
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SKF positioning systems designed a series of compact cross tables that are driven with ironless linearmotors. High guiding / positioning accuracy and high dynamic lead to a perfect solution for wafer measurement. The free area through the whole unit optimizes the mounting position of the measurement device.
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DSM is frequently asked to develop unique scientific and research tools incorporating the smooth, stiction-free motion of flexure mechanisms with the nanopositioning capability of piezoelectric materials and closed-loop servo control.
An example of this type of custom system development is shown in the adjacent picture. The "Nanopress" was developed for mechanical break junction experiments and stress testing of thin films deposited onto silicon substrates. This particular version incorporates capacitive displacement and a load cell sensors.
The basic system's hardware design includes a coarse adjustment capability of 1.5 mm for specimen loading and a piezo actuator that provides 30 microns of precision motion for the actual test procedures. A capacitive probe provides nanometer-level displacement feedback that is fed into DSM's SA piezo amplifier and used to establish the system's servo control.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage?
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Cross table with a large working range.
Stepper Motor Controller integrated.
Plug an play capability, easy to operate.
Application:
Positioning stages for measurement and analytical systems
Technical data:
Working range (X / Y): .....450 x 390 mm
Size: (HxBXW): ................126 x 640 x 580 mm
Drive system:....................Stepper Motor ( Pollux Controller)
Measurement system: .....optical or. magnetically
Limits: .......................... ...precise Hall limit switches
Host Interface: ................ RS-232 / CAN-Bus
Power: .............................24V
Velocity: ...........................up to 80mm/s
Acceleration: ....................up to 250mm/s²
Resolution: ......................1µm
Repeatability: ..................+/- 3µm
Accuracy: .........................+/- 20µm
Weight: ...........................16 kg
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The Fast Piezo shutter developped by the CEDRAT Groupe in collaboration with EMBL (Dr. Cipriani) is based on standard amplified piezo actuators with a special optical head. It provides a compact and low jitter shutter solution for X ray laser beam.
Max No-load displacement (µm): 400
Dimensions (mm): 18,5*60*44
Unloaded resonance frequency (Hz): 900
Response time (ms): 0,56
Mainly based on the APA concept, the CEDRAT Group has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantages of the APA concept offering a reliable, robust, precise and compact solution to the users.
These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force
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- Automated photonics fiber alingment system
- Integrated Alignment Routines for Optical Fibers,Collimators and I/O Chips
- Parallel Kinematics with 6 Degrees of Freedom
- 0.033 µm Actuator Resolution
- Repeatability 0.3 µm in Space
- No Moving Cables for Improved Reliability, Reduced Friction
- Better Dynamics, More Compact than Serial Kinematics Systems
- For Scanning and Alignment
- Cartesian Coordinate Control with Virtualized Pivot Point
- Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
- Choice of Optional Photometers
- Optional PIMotion&Vision with Integrated Real-Time Image Processing
The F-206.S HexAlign™ Hexapod is a highly accurate micropositioning system for complex multi-axis optical alignment tasks. It is based on PI"s long experience with ultra-high-resolution, parallel kinematics stages. Unlike hexapods with variable-length struts ("legs"), the F-206 features constant-length struts and friction-free flexure guides. This gives the F-206 better resolution and repeatability than other hexapod designs.
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DSM’s piezoelectric stage systems are flexure-guided for smooth motion that is free of stiction and backlash for micropositioning and nanopositioning applications. Wide, parallel flexures ensure parallelism in the output motion with minimal rotation.
DSM's piezo stage designs produce up to a full 1 mm motion range in a stable and stiff design. The particular ZSA-1000 model shown in the adjacent image includes a large 28mm diameter through-hole for optical or tooling access. The total stage height is 25 mm, and the stage's footprint is 105 x 120mm.
In semiconductor industry applications, DSM's 1 mm stage systems have been implemented in closed loop control using DSM's SA series servo amplifier and a high resolution capacitive probe for 20nm position stability and very stable velocity ramp profiles.
DSM welcomes custom requests for flexure-guided piezo actuator designs.
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The gantries isel are composed of linear advances and guidance of precision, are regulated without play with drive by engines step by step or, in option, by Servo-moteurs. The precision of repeatability is about + 0,02mm.
The gantries have a whole a very large surface of fastening, with a flatness < 0,05mm. The rigidity of the machines is ensured by 16 linear stages for only axis Y.
The advances are protected from dust and the chips, by Teflon joints with lips.
units of advances of precision
advances regulated without play with drive by engine step by step
reproducibility (in position) ±0,02mm
plane milled surfaces, flatness < 0,05mm
great load rigidity and capacity raised thanks to the 16 linear stages
covering with rubber lips coated with Teflon
precision of the position extremes and reference < 0,0125 mm for a step of 5mm
options: no the screw different
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Multi-Axis, Gantry Systems
H2W also creates innovative multi-axis solutions that utilize both direct drive linear motor technology and rotary-to-linear technology. Our unique solutions are versatile and reliable and offer designers problem-solving approaches to their applications. Turnkey solutions are available that allow you to concentrate on your application without the challenges of integrating motors and controls.
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XY Gantry system
Key Features:
· Turn-key solution
· Modular design
· Direct linear drive
· High speed and acceleration
· Zero backlash
· Fast settling time
· Large travel area
XYZ Gantry Robotics offer significant advantages over robotic arms for high speed automation
#larger work envelopes
#open frame and overhead systems
#larger payloads
These gantry robotics systems are integrated with Linear Servo Slide direct drives which are offered in three frame sizes: small (LSS90), medium (LSS120) and wide (LSS200) with work area from 500 x 500 mm up to 2000 x 3000 mm and payloads up to 200 Kg. These systems have all cable tracks (including user connections) installed for quick disconnect. All robotics axes are aligned and pinned so that axes may be removed and re-attached with original precision.
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Gantry system based on linear synchronous motors mean for use in positioning systems .
Gantry system consist of:
-- Positioning system 2D
-- Controller LSMC-3
Advantages
• brushless linear servomotors direct drive
• High accuracy
• High travel velocity
• there is no backlash, vibration, wear
Application
Portal construction for laser cutting, plasma arc cutting, positioning systems,
2D, 3D mill-engraving systems for light material processing, high-speed pick-and-place, automated assembly.
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Aerotech's ANT-20G goniometers represent a significant breakthrough in high-accuracy angular alignment of optical components. This unique design utilizes Aerotech's best-in-class direct-drive noncontact motor technology. When used with Aerotech's MXH multiplier, the ANT-20G series provides an industry-leading positioning speed of 150 degrees per second.
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Spectral transmission and reflection measurements at any desired angle can be carried out with the GON360 goniometer. Angles for illumination and measurement can be set independently. Optical fibers are used for connecting the measurement optics with the spectrometer, and the light source with the illumination optics. Models from the LS100 / LS500 series can be used as light sources.
Features:
- manual and motorized versions
- measurement angles adjustable over a full 360º
- independent angle settings for illumination and measurement optics
- digital angle display with 0.1º accuracy and 0.01° resolution
- large selection of holders and stages for the test sample
- optional polarizers and viewing optics
Various adjustable stages are available for proper positioning of the test sample in the GON360 - linear translation stages as well as stages for adjusting height, inclination and rotation. In combination with the independently variable angles for illumination and measurement, the GON 360 lends itself to measurement of any type of test sample. The exact positioning of the measurement spot on the sample can be verified with the optional viewing optics.
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The GO 40 goniometer allows an adjustment of ± 20° around a defined optical axis by means of a precision worm gear drive and adjustable dovetail guides. The distance between the mounting surface and the rotation axis of 20 mm can be used for prisms or other optics. Unintended adjustment can be avoided by using a fixing screw. In order to integrate the SYS 65 system, the adapter plate ADP 65B or slide RT 65-35-R should be used.
For motorized versions (step or DC servo motor) see chapter Motorized Positioning Systems in the catalog.
- adjustable dovetail guides
- mountable on slide and adapter plate
- deformation-resistant aluminium alloy, black anodized
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The upper positioner of this compact Euler Goniometer provides high resolution positioning over 7.2°. It is closer to the common center of rotation and therefore the covered angle is slightly higher.
- Environment: LT; UHV; magnetic field
- Motion: stepping
- Travel: 7.2 °
- Resolution: 0.02 m° @ 4 K
- Size: 15 x 15 x 10 mm
- Load: 25g
- Typical minimum step size: 0.1 m° @ 300 K, 0.02 m° @ 4 K
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IKO Cleanroom precision positioning table TC is the most suitable for use in an environment requiring high cleanliness, for example, semiconductor manufacturing equipment and liquid crystal related equipment. Its unique high air-tightness structure seals the driving part and slide table guide part perfectly to prevent dust emission from the table to the surrounding environment. Three types of cleanroom precision positioning tables are available. Slim type TC-US has super cleanliness and compactness with availability of motor holding back type. TC-U has a high rigidity bed with many options and TC-L has a full cover structure that ensures low noise and is excellent in corrosion resistance.
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* Complete, fitted rotary table
* Mechanically and electrically ready for connection
* Hole diameter: 100 mm
* Servo motor ECOSTEP® series 23S
* Reference sensor and holding brake optional
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Frame sizes: 60 mm, 130 mm, 200 mm
Max. speed: 200 r/min (200 mm-type: 110 r/min)
Max. thrust force: 100-4000N
Repetitive positioning accuracy: ±0.004°
Max. permissible torque: 0.9Nm - 50 Nm
Resolution: microstep 0.002-0.04°/step
Power supply: 230V AC for 130 mm/200 mm-type, 24V DC for 60mm-type
Marking: CE, UL and cUL
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DG Series Hollow Rotary Actuators
The ouput table of the hollow rotary actuator allows direct installation of your load.
* Large-Diameter, Hollow Output Table
* Accurate Positioning
* Shorter Positioning Time
* Simple Home Hunting
* RoHS compliant
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Internal anti-backlash leadscrew drives ball slide or crossed roller slide assemblies. Available in one two or three axes. shaft coupling and motor mount included.
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Small, step motor driven stages for light weight (1-15 kg) payload scanning and positioning. Travel ranges from 5 cm to 75 cm. Includes stages, motors and programmable motor controller.
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Linear Motor Table LT is a direct drive positioning table featuring a low sectional height and light weight. An AC linear servo motor and an optical linear scale are compactly integrated in the moving table and bed made of aluminum alloy, and miniature type linear motion rolling guides IKO Linear Way L are assembled in the table guide section. Linear Motor Table LT, adopting a C-shaped magnet yoke arranged in-between two stator magnets together with a moving coil, provides large driving force and achieves high speed and quick response positioning. Linear Motor Table LT is most suitable for applications requiring high speed operation such as semi-conductor and liquid crystal related equipment, measuring instruments, assembling systems, material transfer equipment.
Features:
Maximum thrust 900N for high thrust series
Compactness and high thrust were pursued by adopting miniature optical linear scale and C-shaped magnet yoke. Maximum thrust 900N is achieved by high-density coil arrangement. Also, compact series output 450N with the total height only 40mm
High acceleration and high response with a smooth motion
High acceleration and high response positioning can be made due to super light weight moving table and high thrust. The table can travel with a smooth motion by using C-shaped magnet yoke which cancels out magnet forces and eliminates the unnecessary load on the linear motion rolling guides. Also, C-Sleeve Linear Way, long term maintenance free type, is adopted for their linear motion rolling guides.
High resting stability and speed stability
High resting stability is achieved by the latest servo technology. This linear motor can be used as a high accurate positioning device. Also, high speed stability is achieved.
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Positioning and micro-positioning tables
