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- Optical Deflection to 100 mrad (~6°)
- 1.0 kHz Resonant Frequency with Mirror
- Closed-Loop Version for Higher Linearity
- For Mirrors up to 12.5 mm (0.5") Diameter
- 2 Fixed Orthogonal Axes with a Common Pivot Point
- Sensor Configuration for Excellent Temperature Stability
- Zero Friction Flexure Guides
S-334 piezo stage tip/tilt platforms are fast and compact units providing precise angular movements of a mirror around two orthog-onal axes. The tip/tilt range is 50 mrad with sub-µrad resolution. Highest stability and accuracy is available in closed-loop operation. |
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Nano Linear Stage PT 30-5-MSI
The Nano Linear Stage has a piezo inertial drive. With a travel in the millimetre range and steps in the nanometer range, it is suitable for manifold applications. A built-on miniature measuring system enables highest positioning accuracy and repeatability. A reference point is included in the glass scale. The basic components of the linear stage are made of highstrength aluminium. Due to a black anodized coating, the surface is protected and reflexion-poor. In order to ensure a high load capacity and a long life time, two preloaded linear ball bearing guides are integrated. Several PT 30-5-MSI can be mounted together and build multiaxis combinations. Due to the highly flexible connecting cable, additional forces are reduced, leading to a precise positioning motion. For the mounting of the nanopositioners, the mounting plate NMP 50 is recommended. It is available as accessory. In order to operate the nanopositioners with measuring system, the nano position control NPS 03 has to be used. The complete system is pluggable and ready for connection.
- high power density on little space
- with build-on measuring system
- precise positioning in the nanometer range
- travel in the millimeter range
- particularly high load capacity due to the preloaded linear ball bearing guides
Option
- version for use in vacuum |
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| Rated to 10-10 Torr, this multi-axis stage uses high resolution piezo motors on the X/Y axes to eliminate servo dither and provide a .1µm resolution. The system features high resolution and smooth scanning capability allowing it to move a 300mm wafer under an analyzing sensor inside a vacuum chamber. The X/Y sits on top of a Z wedge stage to provide vertical positioning, controlling the distance to the object. This completely integrated system features servo and piezo motor amplifiers and a 3-axis motion controller. |
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Key features
Six axes PArallel Robot Operating System
Travel ranges linear 350 x 350 x 80 mm
Travel ranges rotation Rx, Ry 40°, Rz, 100°
Maximum speed 30 mm/sec (leg speed)
Pepeatability in space +/- 5µm
High stiffnes
High dynamic
Pivot point can be set by the customer
User friendly software
Load capacity central 150 kg
Including software, controller and amplifiers |
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Hexapod 6-Axis Precision Positioning Stage
6 Degrees of Freedom Nanopositioner
Integrated Alignment Routines for Optical Fibers,Collimators and I/O Chips
Parallel Kinematics with 6 Degrees of Freedom
0.033 µm Actuator Resolution
Repeatability 0.3 µm in Space
No Moving Cables for Improved Reliability, Reduced Friction
Better Dynamics, More Compact than Serial Kinematics Systems
For Scanning and Alignment
Cartesian Coordinate Control with Virtualized Pivot Point
Powerful Digital Controller with Open Source LabViewTM Drivers, DLL Libraries...
Choice of Optional Photometers
Optional PIMotion&Vision with Integrated Real-Time Image Processing |
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Parallel Kinematic Robotics, ALIO Industries (US patents 6,769,194 and 6,671,975) parallel kinematic 3 axis and 6 axis robotic systems promise to revolutionize the manufacturing processes and inspection of products requiring nanometer resolution and repeatability.
With 5 nanometer resolution revolving around a virtual point in space coupled with speeds of up to 250 mm/sec these robotic products form the basis of the next generation of automated nano-positioning systems for the most demanding applications in photonics, packaging, test, micro machining, government, measurement, medical and semiconductor manufacturing. |
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| Aerotech air bearings are perfect in semiconductor equipment, fiberoptics, photonics, and other critical industrial automation applications. Our air bearings incorporate an active preload on both vertical and horizontal surfaces. Opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in outstanding stiffness that is ideal for heavy or offset loading. |
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Leading the World with nano-precision XY planar air bearing systems. ALIO has also developed several air bearing systems for linear, rotary and our patent pending X-Y Planar System.
ALIO linear air bearing systems utilize dovetail and custom designs to exceed nano precision applications.
Linear Dovetail Air Bearings Systems using NewWay Dovetail Bearings. These systems are available with ceramic servo motors or ironless cogless linear servo motors depending on your application needs.
- Up to 600 mm standard dovetail
- Custom systems up to 3 meters
- Linear Motor or Ceramic Servo Motors
- Class 1 Clean Room compatible
- Standard flatness of 0.25 microns per 25 mm of travel |
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| Aerotech photonics and fiberoptics nanopositioners are perfect for the high-volume manufacture of photonics and fiberoptics components and systems. Our fiberoptics positioning systems utilize Aerotech's own brushless linear servomotors for the maximum performance in the most compact package. We manufacture many models of drives and motion controllers to provide a complete fiberoptics and photonics manufacturing package that is virtually maintenance-free and available for 24/7 operation. Aerotech nanopositioners feature the highest closed-loop resolution available with up to six axes of coordinated motion. |
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SKF positioning systems designed a series of compact cross tables that are driven with ironless linearmotors. High guiding / positioning accuracy and high dynamic lead to a perfect solution for wafer measurement. The free area through the whole unit optimizes the mounting position of the measurement device.
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DSM is frequently asked to develop unique scientific and research tools incorporating the smooth, stiction-free motion of flexure mechanisms with the nanopositioning capability of piezoelectric materials and closed-loop servo control.
An example of this type of custom system development is shown in the adjacent picture. The "Nanopress" was developed for mechanical break junction experiments and stress testing of thin films deposited onto silicon substrates. This particular version incorporates capacitive displacement and a load cell sensors.
The basic system's hardware design includes a coarse adjustment capability of 1.5 mm for specimen loading and a piezo actuator that provides 30 microns of precision motion for the actual test procedures. A capacitive probe provides nanometer-level displacement feedback that is fed into DSM's SA piezo amplifier and used to establish the system's servo control.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage? |
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| Linear units E serie supplying horizontal motion over a length stroke, standard or made to measure (from several hundreds of millimeters to 4 meters), handling a "wide range of loads" (from several kilograms until 10 tons). |
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Cross table with a large working range.
Stepper Motor Controller integrated.
Plug an play capability, easy to operate.
Application:
Positioning stages for measurement and analytical systems
Technical data:
Working range (X / Y): .....450 x 390 mm
Size: (HxBXW): ................126 x 640 x 580 mm
Drive system:....................Stepper Motor ( Pollux Controller)
Measurement system: .....optical or. magnetically
Limits: .......................... ...precise Hall limit switches
Host Interface: ................ RS-232 / CAN-Bus
Power: .............................24V
Velocity: ...........................up to 80mm/s
Acceleration: ....................up to 250mm/s˛
Resolution: ......................1µm
Repeatability: ..................+/- 3µm
Accuracy: .........................+/- 20µm
Weight: ...........................16 kg |
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The Fast Piezo shutter developped by the CEDRAT Groupe in collaboration with EMBL (Dr. Cipriani) is based on standard amplified piezo actuators with a special optical head. It provides a compact and low jitter shutter solution for X ray laser beam.
Max No-load displacement (µm): 400
Dimensions (mm): 18,5*60*44
Unloaded resonance frequency (Hz): 900
Response time (ms): 0,56
Mainly based on the APA concept, the CEDRAT Group has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantages of the APA concept offering a reliable, robust, precise and compact solution to the users.
These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force |
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- Automated photonics fiber alingment system
- Integrated Alignment Routines for Optical Fibers,Collimators and I/O Chips
- Parallel Kinematics with 6 Degrees of Freedom
- 0.033 µm Actuator Resolution
- Repeatability 0.3 µm in Space
- No Moving Cables for Improved Reliability, Reduced Friction
- Better Dynamics, More Compact than Serial Kinematics Systems
- For Scanning and Alignment
- Cartesian Coordinate Control with Virtualized Pivot Point
- Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
- Choice of Optional Photometers
- Optional PIMotion&Vision with Integrated Real-Time Image Processing
The F-206.S HexAlign™ Hexapod is a highly accurate micropositioning system for complex multi-axis optical alignment tasks. It is based on PI"s long experience with ultra-high-resolution, parallel kinematics stages. Unlike hexapods with variable-length struts ("legs"), the F-206 features constant-length struts and friction-free flexure guides. This gives the F-206 better resolution and repeatability than other hexapod designs. |
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DSM’s FlexFrame PiezoActuator(TM) series is a family of mechanically amplified, flexure-guided piezo actuators for precision motion control and positioning applications. The actuators feature solid-state flexure hinges to eliminate backlash and stiction.
Standard piezo actuator designs offer displacement capabilities ranging from a few microns up to 2 mm, and the actuators typically feature low voltage (150-200V) piezo material. Custom designs can be produced for unique displacement ranges, design stiffness, and environmental considerations (temperature, vacuum, non-magnetic, etc.), DSM's piezoelectric actuators can also be configured with integrated displacement feedback sensors for closed-loop micropositioning and nanopositioning.
DSM's FlexFrame PiezoActuator(TM) design allows for high displacement performance in an extremely low profile package. Custom mounting conditions can be integrated into the design.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage? |
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DSM's FPA-80E Mini is a flexure-guided piezoelectric actuator ideal for both dynamic and static applications where precise and accurate positioning is required. The FPA-80E Mini is mechanically preloaded to ensure bidirectional operation, providing increased resilience to mechanical loads when compared to non-preloaded actuators. The kinematic mechanism provides high-stroke operation in an exceptionally small package.
The FPA-80E Mini’s compact design is well suited to many applications and comes standard in a durable, non-corrosive stainless steel design pre-tapped with threaded mounting holes to match a customer’s requirements. |
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DSM’s piezoelectric stage systems are flexure-guided for smooth motion that is free of stiction and backlash for micropositioning and nanopositioning applications. Wide, parallel flexures ensure parallelism in the output motion with minimal rotation.
DSM's piezo stage designs produce up to a full 1 mm motion range in a stable and stiff design. The particular ZSA-1000 model shown in the adjacent image includes a large 28mm diameter through-hole for optical or tooling access. The total stage height is 25 mm, and the stage's footprint is 105 x 120mm.
In semiconductor industry applications, DSM's 1 mm stage systems have been implemented in closed loop control using a SA series servo amplifier and a high resolution capacitive probe for 20nm position stability and very stable velocity ramp profiles.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage? |
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The gantries isel are composed of linear advances and guidance of precision, are regulated without play with drive by engines step by step or, in option, by Servo-moteurs. The precision of repeatability is about + 0,02mm.
The gantries have a whole a very large surface of fastening, with a flatness < 0,05mm. The rigidity of the machines is ensured by 16 linear stages for only axis Y.
The advances are protected from dust and the chips, by Teflon joints with lips.
units of advances of precision
advances regulated without play with drive by engine step by step
reproducibility (in position) ±0,02mm
plane milled surfaces, flatness < 0,05mm
great load rigidity and capacity raised thanks to the 16 linear stages
covering with rubber lips coated with Teflon
precision of the position extremes and reference < 0,0125 mm for a step of 5mm
options: no the screw different
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| Small, step motor driven stages for light weight (1-15 kg) payload scanning and positioning. Travel ranges from 5 cm to 75 cm. Includes stages, motors and programmable motor controller. |
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| Aerotech's ANT-20G goniometers represent a significant breakthrough in high-accuracy angular alignment of optical components. This unique design utilizes Aerotech's best-in-class direct-drive noncontact motor technology. When used with Aerotech's MXH multiplier, the ANT-20G series provides an industry-leading positioning speed of 150 degrees per second. |
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The GO 40 goniometer allows an adjustment of ± 20° around a defined optical axis by means of a precision worm gear drive and adjustable dovetail guides. The distance between the mounting surface and the rotation axis of 20 mm can be used for prisms or other optics. Unintended adjustment can be avoided by using a fixing screw. In order to integrate the SYS 65 system, the adapter plate ADP 65B or slide RT 65-35-R should be used.
For motorized versions (step or DC servo motor) see chapter Motorized Positioning Systems in the catalog.
- adjustable dovetail guides
- mountable on slide and adapter plate
- deformation-resistant aluminium alloy, black anodized |
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| IKO Cleanroom precision positioning table TC is the most suitable for use in an environment requiring high cleanliness, for example, semiconductor manufacturing equipment and liquid crystal related equipment. Its unique high air-tightness structure seals the driving part and slide table guide part perfectly to prevent dust emission from the table to the surrounding environment. Three types of cleanroom precision positioning tables are available. Slim type TC-US has super cleanliness and compactness with availability of motor holding back type. TC-U has a high rigidity bed with many options and TC-L has a full cover structure that ensures low noise and is excellent in corrosion resistance. |
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| Internal anti-backlash leadscrew drives ball slide or crossed roller slide assemblies. Available in one two or three axes. shaft coupling and motor mount included. |
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Linear Motor Table LT is a direct drive positioning table featuring a low sectional height and light weight. An AC linear servo motor and an optical linear scale are compactly integrated in the moving table and bed made of aluminum alloy, and miniature type linear motion rolling guides IKO Linear Way L are assembled in the table guide section. Linear Motor Table LT, adopting a C-shaped magnet yoke arranged in-between two stator magnets together with a moving coil, provides large driving force and achieves high speed and quick response positioning. Linear Motor Table LT is most suitable for applications requiring high speed operation such as semi-conductor and liquid crystal related equipment, measuring instruments, assembling systems, material transfer equipment.
Features:
Maximum thrust 900N for high thrust series
Compactness and high thrust were pursued by adopting miniature optical linear scale and C-shaped magnet yoke. Maximum thrust 900N is achieved by high-density coil arrangement. Also, compact series output 450N with the total height only 40mm
High acceleration and high response with a smooth motion
High acceleration and high response positioning can be made due to super light weight moving table and high thrust. The table can travel with a smooth motion by using C-shaped magnet yoke which cancels out magnet forces and eliminates the unnecessary load on the linear motion rolling guides. Also, C-Sleeve Linear Way, long term maintenance free type, is adopted for their linear motion rolling guides.
High resting stability and speed stability
High resting stability is achieved by the latest servo technology. This linear motor can be used as a high accurate positioning device. Also, high speed stability is achieved.
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With its Ball Rail Tables TKK and TKL, Rexroth offers ready-to-install solutions for linear motion applications with high rigidity requirements. The base plate of the ball rail tables is made from machined aluminum profiles or steel with reference edges. Integrated in this rigid axis are Rexroth ball rail systems with four long runner blocks per carriage. These can be driven
by ball screws (TKK) or linear motors (TKL).
To achieve the most economical solution for each specific application, Rexroth also provides matching side drive timing belts or motor mounts and couplings, as well as various motor-controller combinations. |
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Linear tables SLTL-G were studied for the applications which require a very high degree of accuracy of positioning and a high load.
Linear tables SLTL-G are carried out by means of L `assembly of:
- A body, two heads and a plate out of aluminum alloy,
- Two linear guidance with balls with 4 lines type HGH,
- A ball screw of precision rolled, with a precision of the step of 52µ on 300 mm,
- Two stages of ends fixed and free,
- In option, bellows of protection.
- In version X/Y:
These linear tables functioning on 2 axes make it possible to realize
cross movements of precision with important loads.
Our engineering service remains at your disposal for any further information.
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| Linear Motion Rolling Guide technology nurtured in the company over the years and up-to date micro-electronics technology have been combined in this new series. The Precision Positioning Table incorporates IKO Linear Way Series which is used widely in applications for precision machines and machine tools, and takes full advantage of its superior characteristics. Electronic control devices are specially prepared in series to achieve the best performance of the tables so that a well balanced total system including a drive system and electronic control devices can be completed.IKO Mechatronics Series is expected to serve as indispensable components for automation an unmanned control machines. We will now introduce Mechatronics Products created by our original technology. |
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Positioning and micro-positioning tables
