• Products
  • Catalogs
  • News & Trends
  • Exhibitions

annealing furnace / oxidation / bell / electric
206A Koyo Thermos Systems

{{requestButtons}}

Characteristics

  • Function:

    annealing, oxidation

  • Configuration:

    bell

  • Heat source:

    electric

  • Other characteristics:

    horizontal, for the electronics industry

Description

This horizontal furnace is suitable for solar battery and photovoltaic (PV) cell production. 100 to 156 square wafers can be mass-processed in a batch of 200 to 400 wafers each.
Features

No. 1 share in domestic market
Handles 100- to 200-mm square wafers
Batch: 200 to 400 wafers processing is available (depends on flat zone length and wafer pitch)
Fast heating up and cooling down, reduced power using KTS’ exclusive LGO heater