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Annealing furnace 206Adiffusionoxidationthermal
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Characteristics
- Function
- annealing, thermal, oxidation, diffusion
- Configuration
- bell
- Heat source
- electric
- Other characteristics
- horizontal, for the electronics industry
- Width
850 mm
(33.46 in)- Height
2,500 mm
(98.43 in)- Depth
6,700 mm
(263.78 in)
Description
This horizontal furnace is suitable for solar battery and photovoltaic (PV) cell production. 100 to 156 square wafers can be mass-processed in a batch of 200 to 400 wafers each.
Features
No. 1 share in domestic market
Handles 100- to 200-mm square wafers
Batch: 200 to 400 wafers processing is available (depends on flat zone length and wafer pitch)
Fast heating up and cooling down, reduced power using KTS’ exclusive LGO heater
This solar battery and photovoltaic (PV) cell manufacturing horizontal furnace processes 125-mm square and 156-mm square photovoltaic cells and 6- and 8-inch wafers. The optimal furnace for solar battery and photovoltaic (PV) cell production, it can perform phosphorus diffusion, boron diffusion, pyrogenic oxidation, wet oxidation, dry oxidation, annealing and other crystal system thermal processing using POCl3, BBr3 and other materials.
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.