annealing furnace / oxidation / bell / electric
Koyo Thermos Systems
horizontal, for the electronics industry
This horizontal furnace is suitable for solar battery and photovoltaic (PV) cell production. 100 to 156 square wafers can be mass-processed in a batch of 200 to 400 wafers each.
No. 1 share in domestic market
Handles 100- to 200-mm square wafers
Batch: 200 to 400 wafers processing is available (depends on flat zone length and wafer pitch)
Fast heating up and cooling down, reduced power using KTS’ exclusive LGO heater