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annealing furnace / oxidation / bell / electric
206A Koyo Thermos Systems



  • Function:

    annealing, oxidation

  • Configuration:


  • Heat source:


  • Other characteristics:

    horizontal, for the electronics industry


This horizontal furnace is suitable for solar battery and photovoltaic (PV) cell production. 100 to 156 square wafers can be mass-processed in a batch of 200 to 400 wafers each.

No. 1 share in domestic market
Handles 100- to 200-mm square wafers
Batch: 200 to 400 wafers processing is available (depends on flat zone length and wafer pitch)
Fast heating up and cooling down, reduced power using KTS’ exclusive LGO heater