Vertical furnace for 300 mm wafer
50 - 75 wafers | VF-3000
Koyo Thermos Systems
Mini batch, 50 to 75 wafers processing is available for R&D to mass production line
4 to 8 inch wafer size is available
Max 4 cassette stocks
Excellent temperature control from low to medium high temperature range by use of LGO heater
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
