Multi-axis nanopositioning system SMARPOD 70.42

hexapodwith parallel kinematicsultra-high vacuum

Despite its small size the miniaturized SMARPOD 70.42 is able to handle payloads of up to 5 N. The SMARPOD 70.42 is SmarAct’s smallest hexapod-like positioning system with a base plate diameter of only 70 mm. Despite its overall compactness it is a robust and precise system that can handle payloads of up to 5 N to be positioned with a centimeter travel range in X and Y. It is also available in a high vacuum and ultra-high vacuum compatible version and can be built from fully non-magnetic materials. Mechanical Travel [ - 14 (Θx); 16 (Θy); 28 (Θz) Max. Normal Force [N] - 5 Max. Horizontal Force [N] - 2.5 Dimensions [mm] - Ø 70 Height of Platform above Ground [mm] - 42 Weight [g] - 300 Closed-Loop Sensor Types - S; SC Smallest Increment [nm] - 1 Smallest Increment [µrad] - 1 Closed-Loop Repeatability, Full Stroke MCS2 [nm] - < ± 200 Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] - < ± 10 Closed-Loop Repeatability, Full Stroke MCS2 [µrad] - < ± 15 Options Vacuum Options - HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) Non-Magnetic Option - Yes (-NM)