Wafer handling positioning stages

Stroke : 1 mm - 40 mm
Speed: 1 mm/s - 200 mm/s
Repeatability: 0.3 µm - 5 µm

... LA92 High Speed UHV Linear Axis Application: High resolution and fast scanning applications Benefit: Fast positioning in UHV, also vertically Features: Outstanding resolution, very slim, with internal motor • Vacuum: all areas ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

... LT300 Precise high load linear stage Application: Transport Stage, scanning stage for high loads Benefit: High life time despite dry lube Features: lead screw with dry lube or ball screw with ...

Stroke : 1 mm - 300 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.015 µm - 5 µm

... LA97 Nanometer linear stage Application: scanning Benefit: Nanometer- positioning, also vertically Features: positioning with extreme resolution and highest stiffnes can be can be equipped with ...

Stroke : 1 mm - 185 mm
Speed: 1 mm/s - 8.4 mm/s
Repeatability: 0.4 µm - 5 µm

... LA95 - Application: transport stage, scanning stage - Benefit: high life time despite dry lube - Features: lead screw with dry lube or ball screw with liquid lube • Vacuum: all pressure ranges ...

Stroke : 1 mm - 10 mm
Speed: 0.2 mm/s - 10 mm/s
Repeatability: 0.2 µm - 5 µm

... MT53 High-resolution micro stage Application: multi purpose micro stage Benefit: for high resolution scanning Features: positioning with very high resolution • Vacuum: all pressure ranges ...

Stroke : 1 mm - 50 mm
Speed: 1 mm/s - 50 mm/s
Repeatability: 0.3 µm - 5 µm

... KT105-50 High resolution XY stage Application: vacuum-XY- stage Benefit: fast and high resolution Features : parameters for yaw and pitch three times better than the variant with apertur • Vacuum: all areas ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

... KDT300 Stable high load xy stage Application: transport stage , scanning stage for high loads Benefit: - high life time despite dry lube Features: lead life time despite dry lube • Vacuum: ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 2.2 mm/s
Repeatability: 1 µm - 5 µm

... HT160 Precise high load vertical lifting stage Application: vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 16.6 mm/s
Repeatability: 0.7 µm - 5 µm

... HDT255 High load aperture lifting table Application: vacuum lifting stage Benefit: - high stiffnes and load, aperture Features: wedge stage with aperture • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • ...

Stroke : 1 mm - 25 mm
Speed: 1 mm/s - 3.4 mm/s
Repeatability: 0.3 µm - 5 µm

... HT240 Precise high load vertical lifting stage Application: Vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar • ...

Speed: 100, 15 mm/s
Load: 750 kg

... degrees of freedom stages Short Description: Features: High precision, can be assembled, can be customized, light aperture 460mm Delivers consistent and reliable motion accuracy in a compact and rugged stage It has ...

Stroke : 30, 50, 100 mm
Speed: 5, 50 mm/s

... environmental conditions The MT105 is a universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme ...

Stroke : 100, 50 mm
Speed: 5 mm/s
Repeatability: 0.5 µm - 4 µm

... technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, wafer inspection, camera alignment, sensor alignment, inspection of contacts, alignment of mirrors, probing, ...

Stroke : 16 mm
Speed: 1.1 mm/s

... clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Precise lifting stage for high loads The lifting stage is suitable for high-precision vertical movements under extreme conditions, ...