Wafer handling positioning stages

Speed: 100, 15 mm/s
Load: 750 kg

... degrees of freedom stages Short Description: Features: High precision, can be assembled, can be customized, light aperture 460mm Delivers consistent and reliable motion accuracy in a compact and rugged stage ...

Stroke : 1 mm - 40 mm
Speed: 1 mm/s - 200 mm/s
Repeatability: 0.3 µm - 5 µm

LA92 High Speed UHV Linear Axis Application: High resolution and fast scanning applications Benefit: Fast positioning in UHV, also vertically Features: Outstanding resolution, very slim, with internal motor • ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

LT300 Precise high load linear stage Application: Transport Stage, scanning stage for high loads Benefit: High life time despite dry lube Features: lead screw with dry lube or ...

Stroke : 1 mm - 300 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.015 µm - 5 µm

LA97 Nanometer linear stage Application: scanning Benefit: Nanometer-positioning, also vertically Features: positioning with extreme resolution and highest stiffnes can be can ...

Stroke : 1 mm - 185 mm
Speed: 1 mm/s - 8.4 mm/s
Repeatability: 0.4 µm - 5 µm

LA95 - Application: transport stage, scanning stage - Benefit: high life time despite dry lube - Features: lead screw with dry lube or ball screw with liquid lube • Vacuum: ...

Stroke : 1 mm - 10 mm
Speed: 0.2 mm/s - 10 mm/s
Repeatability: 0.2 µm - 5 µm

MT53 High-resolution micro stage Application: multi purpose micro stage Benefit: for high resolution scanning Features: positioning with very high resolution • Vacuum: all ...

Stroke : 1 mm - 50 mm
Speed: 1 mm/s - 50 mm/s
Repeatability: 0.3 µm - 5 µm

KT105-50 High resolution XY stage Application: vacuum-XY-stage Benefit: fast and high resolution Features : parameters for yaw and pitch three times better than the variant with apertur • ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

KDT300 Stable high load xy stage Application: transport stage , scanning stage for high loads Benefit: - high life time despite dry lube Features: lead life time despite dry lube • ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 2.2 mm/s
Repeatability: 1 µm - 5 µm

HT160 Precise high load vertical lifting stage Application: vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 16.6 mm/s
Repeatability: 0.7 µm - 5 µm

HDT255 High load aperture lifting table Application: vacuum lifting stage Benefit: - high stiffnes and load, aperture Features: wedge stage with aperture • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 25 mm
Speed: 1 mm/s - 3.4 mm/s
Repeatability: 0.3 µm - 5 µm

HT240 Precise high load vertical lifting stage Application: Vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 10 mm
Speed: 200 mm/s

XY-Rotary stages with linear motors and direct torque motors designed with a low profile for wafer handling and many other automated accurate positioning applications ...

Stroke : 200 mm
Speed: 400, 800 mm/s

Open-frame XY-Rotary stages designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. ...

Stroke : 280 mm
Speed: 400, 800 mm/s

Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. ...

Stroke : 350 mm
Speed: 800, 400 mm/s

Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. ...

Stroke : 200 mm
Speed: 100 m/s
Repeatability: 2 µm

Combination of XY ball-screw driven open frame XY stages with Lift MLVT stages and compact worm gear rotary RTLA table - XY stroke 100mm to 300mm - Lift 12mm to 25mm - Unlimited rotation