The compact air mass flow sensors in the MCS200 series can be used with atmosphere analyzers to measure air flow rate or with gas analyzers to measure nitrogen flow rate, and can be used to confirm vacuum suction of minute electronic parts.
Compared to the MCS100 series, these sensors are smaller and lighter. Connection to piping is made through manifolds.
The MCS200 is a compact, fast-response air/nitrogen mass flow sensor equipped with Azbil's own mass flow meter sensor chip. The MCS200 outputs the flow rate converted to standard conditions (20 °C, 1 atm), without the need for temperature or pressure compensation.
The MCS200 offers wide rangeability and various flow rate ranges. It is ideal for flow measurements in numerous scientific and industrial applications.
Compact and lightweight
S and L types: 28,2 x 10,0 x 12,1 mm (including mounting tabs and connector socket), weighing just 5 g.
R type: 28,2 x 10,0 x 11,8 mm (including mounting tabs and connector socket), weighing just 5 g.
Can be installed in extra small mounting space using manifold mounting
Fast response time: 5 ms max.
S and L types: +/- 3% FS
R type: +/- 5% FS
Measures positive or negative flow (R type only)
Low power consumption