UV-visible mini spectrometer C16767MA

ultravioletCMOSfor the semiconductor industry

Overview
The C16767MA is a high-sensitivity, ultra-compact spectrometer head optimized for the ultraviolet range (190–440 nm). It is intended for integration into compact or mobile measurement systems requiring UV detection down to deep UV wavelengths.

Features

• Fingertip size: 20.1 × 12.5 × 10.1 mm
• Weight: 5 g
• Spectral response range: 190 to 440 nm
• High sensitivity designed for UV measurements
• Spectral resolution: up to 8 nm (max.), typical 5.5 nm (FWHM)
• Supports synchronized integration (electronic shutter function)
• Designed for integration into mobile measurement equipment
• Wavelength conversion factor provided on final inspection sheet

Applications / Use examples

• Water quality analysis (examples: nitric acid, nitrous acid, BOD)
• Atmospheric analysis (NO, SO2, etc.)
• Monitoring UV-LEDs and UV bands: UV-A, UV-B, UV-C
• Semiconductor process monitoring (plasma, gas, etc.)

Technology and structure
The C16767MA series uses a CMOS linear image sensor with an integrated slit produced by etching technology and a reflective concave-surface diffraction grating manufactured by nanoimprint lithography. The image sensor is enhanced for UV resistance, and a stray-light suppression filter is formed on the sensor using a proprietary opto-semiconductor process to reduce stray light from diffraction.

Additional technical notes
The module is non-cooled and employs a linear CMOS image sensor with an integrated slit; total number of pixels: 288. Measurement conditions unless otherwise noted: Ta = 25 °C.

Technical specifications

• Spectral response range: 190 to 440 nm
• Spectral resolution (FWHM) (typ.): 5.5 nm
• Spectral resolution (FWHM) (max.): 8 nm
• Cooling: Non-cooled
• Built-in sensor: CMOS linear image sensor with integrated slit
• Number of total pixels: 288 pixels
• Measurement condition: Typ. Ta = 25 °C (unless otherwise noted)
• Size: 20.1 × 12.5 × 10.1 mm
• Weight: 5 g
• Supports synchronized integration (electronic shutter)