Ultraviolet mini spectrometer C16767MA-01

CMOSfor the semiconductor industryOEM

Overview
The C16767MA-01 is an ultra-compact, high-sensitivity mini spectrometer head for ultraviolet measurements (190 nm–440 nm). Designed for straightforward integration into compact and portable analytical instruments used in industrial monitoring and field analysis.

Key features

• Fingertip size: 20.1 mm × 12.5 mm × 10.1 mm
• Weight: 5 g
• Spectral response: 190 nm to 440 nm
• Spectral resolution (typ.): 3.2 nm; (max.): 5 nm
• Supports synchronized integration (electronic shutter)
• Non-cooled operation
• Wavelength conversion factor provided on final inspection sheet

Technology / Design
The C16767MA-01 incorporates a CMOS linear image sensor with an integrated etched slit and a reflective concave grating produced by nanoimprint lithography. The sensor features enhanced UV resistance and an on-sensor stray light cut filter to suppress diffraction-induced stray light, improving signal fidelity in the UV band.

Application examples

• Water quality analysis (organic compounds, BOD)
• Atmospheric gas monitoring (e.g. NO, SO2)
• UV-LED characterization (UV-A, UV-B, UV-C)
• Semiconductor process monitoring (plasma and process gas diagnostics)

Measurement examples (notes)
Demonstration modules using the C16767MA-01 have produced measurements for nitric and nitrous acids, BOD and select organic compounds (e.g. anthracene) that compare favorably with larger bench spectrophotometers for specific analyses. Refer to application notes for detailed test conditions and calibration procedures.

Technical specifications

• Spectral response range: 190 nm to 440 nm
• Spectral resolution (FWHM) (typ.): 3.2 nm
• Spectral resolution (FWHM) (max.): 5 nm
• Cooling: Non-cooled
• Sensor: CMOS linear image sensor with integrated slit
• Total pixels: 288
• Typical measurement condition: Ta = 25 °C unless otherwise noted