The adoption of thick bellows enables the pump to discharge liquid under pressure as high as 0.45 MPa maximum. Moreover, the bellows have three or four times as long a life as a diaphragm. Thus, the downtime can be substantially reduced.
In addition to its use in feeding chemical liquid, the FW series specified for high pressure and medium temperature (10 to 100˚C) is usable in a cleaning system and for the circulation of CMP slurry liquid and the FW-H series for high pressure and high temperature (10 to 180˚C) is usable as a circulation pump in a cleaning system.
The fitting portions for suction and discharge are of PFA tubular structure formed integrally. This prevents particles from accumulating and allows joints available on the market to be used.
When connected to a special controller, the discharge can be controlled and monitored easily.