OverviewAlN-BN composite ceramic parts are produced by sintering boron nitride (BN) and aluminum nitride (AlN) powders. The composite provides electrical insulation combined with thermal conductivity, mechanical strength, resistance to thermal shock and resistance to halogen gas plasma, making it suitable for components that require heat dissipation and vacuum compatibility in semiconductor and vacuum equipment.
Function in Ion SourcesIn ion sources, atomic and molecular ions are generated inside a vacuum chamber. The AlN/BN composite delivers electrical insulation, thermal conduction, vacuum sealing capability and low outgassing, making it suitable for heat sinks, thermal transfer plates and structural vacuum parts in ion source assemblies.
Material Advantages- Mechanical strength and structural stability.
- High thermal conductivity for effective heat dissipation.
- Low coefficient of thermal expansion.
- Low dielectric loss and reliable electrical insulation.
- Corrosion resistance and non-wetting by molten metals.
- Good machinability to precise, complex geometries.
- Vacuum sealing capability with low gas release.
- Permits transmission of visible and infrared wavelengths; suitable for high-frequency wave environments.
Material Properties- Main composition: BN + AlN
- Color: Greyish-Green
- Density: 2.8–2.9 g/cm3
- Three-point bending strength: 90 MPa
- Compressive strength: 220 MPa
- Thermal conductivity: 85 W/m·K
- Thermal expansion coefficient (20–1000℃): 2.8 × 10^-6 /K
- Max use temperature (in atmosphere): 900 ℃
- Max use temperature (in inactive gas): 1750 ℃
- Max use temperature (in high vacuum): 1750 ℃
Applications- Heat sinks and thermal transfer components
- Vacuum components and feedthroughs
- Parts requiring low dielectric constant and low dissipation factor
- Components where a low coefficient of thermal expansion is required
- Electronic components combining electrical insulation and heat dissipation
- Electric propulsion discharge channels for Hall Effect Thrusters
Technical specifications- Composition: BN + AlN
- Color: Greyish-Green
- Density: 2.8 – 2.9 g/cm3
- Three-point bending strength: 90 MPa
- Compressive strength: 220 MPa
- Thermal conductivity: 85 W/m·K
- Thermal expansion coefficient (20–1000℃): 2.8 × 10^-6 /K
- Max use temperature: 900 ℃ (in atmosphere); 1750 ℃ (in inactive gas); 1750 ℃ (in high vacuum)