Cold cathode vacuum gauge

ionizationhot cathode

Overview
The INNOVACERA high vacuum ionization gauge measures vacuum level for laboratory, industrial and research vacuum systems. It ionizes gas molecules in a dedicated chamber and measures the resulting ion/electron current to determine gas density and vacuum degree. Available in hot cathode, cold cathode and radioactive variants depending on the application and pressure range.

Working principle
The gauge comprises an ionization chamber and an electron/ion collector. Gas molecules entering the chamber are ionized by heating filaments, electron beams or other ionization sources. Positive ions (or electrons, depending on design) are collected under an electric field, producing a measurable current proportional to the gas molecule density. An increase in measured current corresponds to higher gas density (lower vacuum); a decrease indicates lower gas density (higher vacuum).

Measuring range

• Use high voltage and a larger ionization chamber for measurements at very low pressures
• Use lower voltage and a smaller chamber for measurements at higher pressures

Nominal measuring range: 0.1 ~ 10^-8 Pa

Technical specifications

• Product type: High vacuum ionization gauge
• Manufacturer: INNOVACERA
• Measurement principle: Ionization of gas molecules in a chamber with collection of charged particles; measurement of resulting current proportional to gas density
• Ionization methods: Hot cathode (heated filament), cold cathode, electron beam, radioactive source (type-dependent)
• Recommended operation: high voltage + large chamber for very low pressures; low voltage + small chamber for higher pressures
• Nominal measuring range: 0.1 ~ 10^-8 Pa

Applications

• Laboratory vacuum systems and research facilities
• Industrial vacuum processes: thin-film deposition, semiconductor processing, surface treatment
• Vacuum metrology and calibration laboratories

Installation and maintenance
Mount the gauge on a compatible vacuum port with proper electrical feedthroughs and grounding. Ensure cleanliness to avoid contamination of the ionization chamber. Calibrate regularly against a reference gauge. Replace filaments or radioactive sources according to manufacturer instructions and follow safety procedures for radioactive types.