OverviewHermetic ceramic‑to‑metal and glass‑ceramic‑to‑metal multipin feedthroughs provide sealed electrical and instrumentation connections into high‑vacuum and ultra‑high‑vacuum (UHV) environments. Designed for inline mating with external plugs, some variants accept plugs on both the air and vacuum sides to simplify installation and maintenance.
Applications- Semiconductor processing equipment
- Analytical test and measurement instruments
- Pressure transducers and sensors
- Power generation measurement and control systems
- Particle accelerators
- High‑temperature furnaces
- Energy research facilities
Materials and constructionReceptacles are manufactured from high‑purity, vacuum‑compatible materials. Insulators use high‑strength, low‑loss alumina ceramics (94%–99% Al2O3) metalized via refractory‑metal sintering. Structural and mating parts are available in Kovar®, stainless steel, nickel‑iron alloys, cupro‑nickel alloys, molybdenum and Alumel®. Assemblies are brazed using copper, gold‑copper or silver‑copper alloys to ensure hermeticity.
Ceramic-to-Metal sealing materials- 94%–99% Al2O3 — Kovar — Copper braze
- 94%–99% Al2O3 — Stainless steel — Gold‑copper braze
- 94%–99% Al2O3 — Nickel‑iron alloy — Silver‑copper braze
- 94%–99% Al2O3 — Cupro‑nickel alloy — (braze option)
- 94%–99% Al2O3 — Molybdenum — (direct seal option)
Benefits- Hermetic sealing suitable for high‑vacuum and UHV applications
- High voltage capability >12 kV DC
- High current capacity up to 40 A per pin
- Leak tested to 1×10⁻¹⁰ mbar·L/s He
- Operating temperature range from cryogenic −250°C to +450°C
- RoHS compliant materials and processes where applicable
- Custom configurations available to match application requirements
Technical specifications- Product type: Ceramic‑to‑Metal and Glass‑Ceramic‑to‑Metal multipin feedthroughs (≥2 conductors)
- Ceramic insulator: 94%–99% Al2O3 (alumina)
- Metals: Kovar®, stainless steel, nickel‑iron alloys, cupro‑nickel alloys, molybdenum, Alumel®
- Braze materials: Copper, gold‑copper, silver‑copper alloys
- Electrical: Voltage >12 kV DC; Current up to 40 A per pin
- Vacuum performance: Hermetic; leak tested to 1×10⁻¹⁰ mbar·L/s He; suitable for HV and UHV
- Temperature range: −250°C to +450°C
- Compliance: RoHS where applicable
- Customization: Available to meet specific instrumentation and feedthrough requirements