Innovacera’s quadrupole mass filter, abbreviated as quadrupole, is the core component of the quadrupole mass spectrometer. It is usually composed of four parallel cylindrical or hyperbolic metal rods. Two pairs of electrodes are applied: DC voltage (DC, U) and radio frequency voltage (RF, V·cos(ωt)). The quadrupole mass analyzer separates ions based on the stability of the ion trajectory in the oscillating electric field.
Structural Parameter Table:
- Material Options: Ceramic plated Gold/Stainless Steel/Molybdenum
- Rod diameter: 2-16mm
- Rod Length: 100-300mm
- Base: Alumina Ceramic/Machinable Glass Ceramic
- Comprehensive accuracy: ≤3μm
99% Alumina Ceramic Material Properties:
- Color: Ivory
- Main Characteristics: Excellent plasma corrosion resistance, high wear resistance.
- Application Field: Semiconductor equipment components, wear-resistant and corrosion-resistant parts.
- Density: 3.88 g/cm3
- Water Imbibition: 0%
- Vickers Hardness: 17 HV
- Bending Strength: 350 MPa
- Compressive Strength: 2450 MPa
- Young’s Modulus: 350 GPa
- Poisson’s Ratio: 0.22
- Fracture Toughness: 4-5 MPa·m1/2
- Linear Coefficient of Expansion (40-400°C): 8.2 x10-6/°C
- Thermal Conductivity (20°C): 25-30 W/(m·k)
- Specific Heat: 0.8 J/(kg·k)x103
- Volume Resistivity (20°C): >1015 Ω·cm
- Dielectric Strength: 20 KV/mm
- Dielectric Constant: 9.2
- Dielectric Loss Coefficient: 2 x10-4
- Nitric Acid (HNO3) (90°C) Weight Loss: 1015 Ω·cm, Dielectric Strength 20 KV/mm, Dielectric Constant 9.2, Dielectric Loss Coefficient 2 x10-4, Max Using Temperature 1500°C