Atomic force microscope

for researchfor materials researchfor the electronics industry

Product overview
The Atomic Force Microscope (wafer-level AFM) is a high-resolution scanning probe instrument designed to characterize three-dimensional surface morphology and multifunctional properties of conductors, semiconductors and insulators at wafer scale, with automated probe approach and high positioning accuracy.

Features

• Advanced multifunction testing: measurement capabilities include Young's modulus, adhesion, magnetic domain imaging, surface potential, work function and other physical quantities.
• Adaptable environment: compatible with accessories such as culture dishes and heating stages; supports measurements in air and liquid phases and operation in underwater and high-temperature environments.
• Intelligent probe approach: one-key automatic probe insertion via piezoelectric scanning tube.
• Adaptable sample size: designed for 12-inch wafer handling and backward compatible with 8-, 6-, 4-inch wafers and fragments.

Technical indicators

• Noise level (XY): 0.2 nm (closed loop), 0.02 nm (open loop).
• Noise level (Z): 0.06 nm (closed loop), 0.03 nm (open loop).
• Nonlinearity: 0.15% (XY), 1% (Z).
• Scanning mode: XYZ full probe scanning mode (sample remains stationary during scanning).
• Scanning range: 90 μm × 90 μm × 9 μm.
• Scanning rate: 0.1 Hz to 30 Hz.
• Image sampling points: from 32 × 32 up to 4000 × 4000.
• Sample size compatibility: 12-inch wafer; backward compatible with 8-, 6-, 4-inch wafers and fragments.
• Working modes: contact, tapping, non-contact.
• Adaptive environments: air and liquid phases.
• Multifunctional measurement modes: EFM, KPFM, PFM, C-AFM, SCFM, MFM, LFM, nano-etching/processing, single-point force spectroscopy, force modulation mode.
• Optional: fully automatic loading and unloading.
• Fully automatic probe approach system: 35 mm stroke, step accuracy 50 nm.

Representative images / actual cases

• Globular protein sample morphology (tapping mode).
• Au-Ti strip electrode potential — scanned by KPFM (lift mode), example scan: 18 μm × 18 μm.
• Electrostatic force of Au-Ti strip electrode — EFM (lift mode), example scan: 18 μm × 18 μm.
• Fe-Ni thin film magnetic domain — MFM (lift mode), example scan: 14 μm × 14 μm.
• PbTiO3 piezoelectric vertical amplitude map — PFM (contact mode), example scan: 20 μm × 20 μm.
• Polystyrene sphere morphology — tapping mode, example scan: 10 μm × 10 μm.
• SiC whisker morphology images.

Characteristics / specifications

• Probe type: micro-cantilever probe for 3D surface characterization.
• Imaging resolution: up to 20 picometers (system claim).
• Positioning stage: motorized sample positioning stage with optical imaging; positioning accuracy 1 µm over a 300 mm × 300 mm area.
• Automation: automated probe approach and scanning parameter adjustment; optional fully automatic wafer loading/unloading.
• Environment & sample support: supports culture dishes, heating stages, liquid cells and high-temperature setups for flexible experimental conditions.
• Typical applications: materials characterization, magnetic domain imaging, surface potential mapping, piezoelectric response mapping, nanoscale morphology of biological and inorganic samples.