Magnetic probe station DX1PS4

manual

Overview

Wafer-level Vertical Magnetic Field Probe Station is designed for wafer-level magnetic characterization and device testing. It supports up to 12-inch wafers, multiple probe types (DC or microwave), and provides precise magnetic field monitoring with efficient testing workflow.

Technical specifications

• Magnetic field direction: Vertical
• Magnetic field strength: Vertical magnetic field >700 mT
• Air gap adjustable: No
• Sample size: 12-inch wafer (backward compatible with 8-inch, 6-inch and fragments)
• Probe type and quantity: DC probes (set of 4) or microwave probes (set of 4); compatible with up to 4 sets of probes (RF or DC)
• Sample stage parameters: XY electric control travel ±150 mm, adjustment accuracy 2 μm; T-axis manual adjustment ±5°, minimum adjustment accuracy 5°
• Microscope type: Monocular microscope
• Magnetic field uniformity: ±1% @ φ1 mm (structure universally designed except the magnet)
• Magnetic field monitoring: Real-time monitoring and feedback; monitoring accuracy better than 1%; magnetic field resolution better than 0.02 mT
• Z-axis probe platform: Rapid lifting function for efficient testing; manual lifting can be upgraded to electric control

Compatibility and probes

Supports DC and microwave probe sets, up to four simultaneous probe sets for parallel measurements. Probe selection and arrangement are compatible with standard wafer probe cards and fixtures.

Typical applications

• Wafer-level magnetic characterization
• MR sensor testing and calibration
• Spintronic device evaluation
• R&D and production process verification for magnetic devices

Operational advantages

Integrated real-time magnetic field feedback and high-resolution monitoring ensure repeatable measurements. XY travel and fine adjustment support precise probe placement at wafer scale, while the rapid Z-axis lifting improves test throughput.

Options and ordering

Available options include motorized Z-axis upgrade, microscope upgrades, field calibration services and custom wafer fixtures. Contact sales for configuration and lead time.