Automatic probe station DX1PS3

vacuummagnetic

Overview

DX1PS3 Wafer Level Automatic In-plane Magnetic Field Probe Station is designed for electrical and magnetic characterization of semiconductor materials, micro‑nano and spintronic devices. It provides a one-dimensional in‑plane magnetic field up to 330 mT (at 10 mm air gap) and supports high‑precision DC/RF electrical measurements.

Parameter introduction

• Model: DX1PS3
• Magnetic field direction: In‑plane (X)
• Magnetic field strength: ≥ 330 mT @ 10 mm air gap
• Air gap adjustable: No
• Sample size: 12‑inch wafer (backward compatible with 8" and 6" chips)
• Probe type and quantity: DC probes (set of 4) or microwave probes (set of 4)
• Sample stage: XY electric control travel ±150 mm, adjustment accuracy 2 μm; T‑axis manual ±5°, minimum adjustment accuracy 5′
• Microscope type: Monocular microscope

Product description

• Supports in‑plane magnetic field testing with modular structure (magnet exchangeable); magnetic field uniformity ±1% @ 1 mm.
• Real‑time magnetic field monitoring and feedback with accuracy better than 1% and resolution better than 0.02 mT.
• Holds up to 12‑inch wafers and is compatible with 8" and 6" samples.
• Accepts up to 4 probe sets (RF or DC) and provides a Z‑axis probe platform with rapid lifting for efficient throughput.
• Integration-ready design including Hall probe, Gauss meter and microscope adjustment bracket.

Specific configuration (summary)

• Main assembly: DX1PS3 Wafer Level Automatic In‑plane Magnetic Field Probe Station
• One‑dimensional in‑plane electromagnet (1 pc): X direction, ≥330 mT @ 10 mm air gap, uniform zone ±1% @ 1 mm, resolution 0.02 mT
• Power supply / current source 400 W (1 pc): continuous bipolar output, four‑quadrant operation, configurable current change rate (0.00001 to 0.5 F.S./s, F.S.=5 A), AC input single‑phase 220 V ±10%
• Sample carrier (1 pc): X/Y travel ±150 mm, resolution 2 μm; manual T‑axis ±5° (sensitivity ~5′); carrier diameter 10 inches, vacuum adsorption
• Probe holder / fixture (4 pcs): vacuum switch base; XY fine travel ±6 mm; adjust resolution ±1 μm; 30° tilt; includes DC probes (typical set 4), leakage accuracy ≥10 pA, max current 1 A, withstand voltage 700 V, highest frequency 1 MHz; ≥1.5 m coaxial cables, BNC male
• Control PC (1 pc): Intel i5, 16 GB RAM, 256 GB SSD + 512 GB HDD, 23.8" display
• Oil‑free vacuum pump (1 pc): continuous 24 h operation, airflow ≥ 7 L/min
• Monocular microscope (1 pc): coaxial illumination, working distance ≥ 80 mm; camera 5 MP, 30 fps, USB2.0; magnification 0.75X–5X, continuous zoom
• Air flotation table (1 pc): table size ≥ 800 × 1200 mm; includes compressor
• Integration of probe station body: concealed vacuum channels, Z‑axis manual device resolution 10 μm, no position drift under maximum magnetic field
• Water chiller (1 pc): 5–35 °C, 1200 W @ 25 °C, 10 L tank, temperature control ±1 °C

Test interface

• Dedicated test interface for magnetoresistance measurements (schematic image provided on product page)

Technical specifications

• Model: DX1PS3
• Magnetic field direction: In‑plane (X)
• Magnetic field strength: ≥ 330 mT @ 10 mm air gap
• Magnetic field uniformity: ±1% @ 1 mm
• Magnetic field monitoring: accuracy <1%; resolution <0.02 mT
• Sample compatibility: 12" wafer (compatible with 8" and 6")
• XY travel (sample stage): ±150 mm, adjustment accuracy 2 μm
• T‑axis: manual ±5°, minimum adjustment accuracy 5′
• Probe capacity: up to 4 sets (RF or DC); typical set: 4 probes
• Probe holder resolution: ±1 μm; XY fine travel ±6 mm
• Power supply/current source: 400 W, four‑quadrant bipolar output, rated max output current 5 A
• Z‑axis probe platform: manual (upgradeable to electric)
• Microscope: monocular, working distance ≥ 80 mm, camera 5 MP, 30 fps, continuous zoom 0.75X–5X
• Vacuum pump: oil‑free, continuous operation, airflow ≥ 7 L/min
• Air flotation table: ≥ 800 × 1200 mm
• Water chiller: 5–35 °C, 1200 W @ 25 °C, 10 L tank, ±1 °C control
• Control PC: Intel i5, 16 GB RAM, 256 GB SSD + 512 GB HDD, 23.8" display