Furnaces and oven feedthrough

for measurement instrumentsfor heatingfor power supplies

Overview
In vacuum systems, vacuum electrical power feedthroughs provide a hermetic electrical path from atmosphere to vacuum while preserving cavity integrity. They are used to deliver power for heating, high-voltage supplies and particle-beam processes under high and ultra-high vacuum conditions.

Design core: Sealing, insulation and current carrying capacity

• Manufactured using proven ceramic-to-metal brazing to achieve atomic-level hermetic seals suitable for high vacuum and UHV; stable performance during high-temperature bake-out.
• Mechanical and electrical structure based on 304/316L stainless steel flanges with compatibility for CF, KF and ISO interfaces; conductors in oxygen-free copper, copper-nickel alloy or Kovar; optional gold or nickel plating to lower contact resistance; high-purity alumina (Al2O3) insulators for electrical insulation and thermal stability.
• Flexible electrical configurations supporting single, dual and multi-conductor arrays; available in high-current, high-voltage or combined power variants—configurable for hundreds of amperes or tens of kilovolts depending on design.

Core product advantages

• Hermetic sealing: Ceramic-to-metal metallurgical bonding eliminates leak paths, preserving vacuum level and process purity.
• Wide customization range: Voltage, current, conductor count, flange type and installation dimensions configurable to system requirements.
• Resistance to harsh environments: Broad operating temperature range, tolerance to particle irradiation, compatible with plasma and corrosive atmospheres.
• Standardized integration: Compliant with international vacuum flange standards for straightforward installation and reduced integration time.
• Low outgassing and long life: Constructed from inorganic materials with minimal gas emission and negligible aging for long-term operation.

Typical application scenarios

• PVD/CVD vacuum coating equipment: Power connection for heaters or anode-cathode supplies.
• Vacuum furnaces and heat-treatment systems: Feedthroughs for heating elements and internal power/control modules.
• Electron-beam and ion-beam systems: Deliver high-voltage or high-current power into evacuated chambers for acceleration or deposition.
• Vacuum test and analysis instruments: Multi-channel electrical connections for SEM, mass spectrometers and similar equipment.

Notes
Product combines vacuum engineering, materials science and precise brazing with high-voltage insulation design; performance affects processing capability, reliability and safety of vacuum equipment.

Specifications / Technical characteristics

• Sealing: Ceramic-to-metal brazing delivering hermetic/atomic-level airtight seals for high vacuum and UHV.
• Flange compatibility: CF, KF and ISO standard interfaces; flanges typically 304/316L stainless steel.
• Conductor materials: Oxygen-free copper, copper-nickel alloys, Kovar; optional gold or nickel plating to reduce contact resistance.
• Insulator material: High-purity alumina (Al2O3) ceramic for reliable insulation and thermal stability.
• Electrical configurations: Single, dual, multi-conductor arrays; configurable as high-current (hundreds of A), high-voltage (tens of kV) or combined types.
• Environmental tolerance: Wide operating temperature range; resistant to particle irradiation; compatible with plasma and corrosive atmospheres.
• Outgassing and longevity: Inorganic construction with extremely low gas emission and minimal aging.
• Customization: Voltage, current, conductor count, flange type and installation dimensions available for bespoke designs.