Vacuum feedthrough

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Overview
Innovacera’s ceramic-to-metal sealing components, including ceramic vacuum feedthroughs, combine high‑purity alumina insulators with precisely machined metal pins. Permanent, gas‑tight sealing is achieved by high‑temperature vacuum brazing. These feedthroughs are engineered for high vacuum and ultra‑high vacuum applications and for harsh operating conditions, offering stable performance under thermal shock, mechanical stress and long‑term bakeout. They provide reliable signal transmission, power feed and sensor interfaces in vacuum systems used across scientific and industrial equipment such as mass spectrometers, CT tubes, electron microscopes, particle accelerators, vacuum metallurgy, semiconductor coating and spacecraft simulation chambers.

Structure and Materials

• Ceramic insulator: High‑purity alumina (≥95% Al2O3) with excellent electrical insulation, thermal resistance and chemical stability
• Metal pins/rods: Stainless steel, molybdenum, Kovar or nickel‑based alloys (optional) to match different thermal expansion requirements
• Sealing method: High‑temperature vacuum brazing (metal‑ceramic eutectic brazing) providing a permanent, gas‑tight joint
• Structural form: Multi‑pin designs (2, 3, 4 pins or custom), available in axial or flange configurations

Advantage

• Excellent vacuum sealing performance
• High resistance to elevated temperatures and thermal cycling
• Strong electrical insulation
• Long‑term operational reliability
• High degree of customization (materials, pin count, mounting)

Typical Application

• Vacuum furnaces and high‑temperature vacuum heating systems
• Vacuum coating and plasma processing equipment
• Semiconductor manufacturing and research vacuum devices
• High‑vacuum sensors and electro‑vacuum components

Technical Specifications

• Ceramic material: ≥95% alumina (Al2O3)
• Sealing process: High‑temperature vacuum brazing
• Operating vacuum: High vacuum / Ultra‑high vacuum
• Leak rate: ≤10⁻⁹ mbar·L/s
• Operating temperature: Up to 300–800°C (structure dependent)
• Pin count: 1–4 pins (customizable)
• Insulation resistance: ≥10⁹ Ω
• Mounting type: Flange / feedthrough / custom