OverviewCeramic‑to‑Metal and Glass‑Ceramic‑to‑Metal multipin feedthroughs are hermetic electrical feedthroughs with two or more conductors, designed to transmit instrumentation signals, voltage and/or current into high‑vacuum and ultra‑high‑vacuum environments. Many designs accept plugs on the air side; selected variants allow vacuum‑side plugs.
Applications- Semiconductor processing equipment
- Analytical test and measurement systems
- Pressure transducers and sensors
- Power generation measurement and control
- Particle accelerators and research facilities
- Industrial and laboratory furnaces
- Energy research installations
Materials and AssemblyReceptacles use high‑purity, vacuum‑compatible materials. Insulators are high‑strength alumina ceramics (94%–99% Al2O3) metalized via refractory‑metal sintering. Metal components include Kovar®, stainless steel, nickel‑iron alloys, cupro‑nickel alloys, molybdenum and Alumel®. Assemblies are brazed with copper, gold‑copper or silver‑copper alloys to ensure hermeticity.
Ceramic‑to‑Metal Sealing Materials:Ceramic Insulator |
Metal |
Solder / Braze94%–99% Al2O3 | Kovar | Copper
| Stainless steel | Gold‑copper
| Nickel‑iron alloy | Silver‑copper
| Cupro‑nickel alloy |
| Molybdenum |
Benefits- Hermetic sealing with vacuum leak testing to 1×10‑10 mbar·L/s He
- High voltage capability (>12 kV DC)
- High current capability (up to 40 A per pin)
- Operation in high‑vacuum and UHV environments
- Wide temperature range: from cryogenic −250°C to +450°C
- RoHS compliant
- Custom designs available to meet application requirements
Technical Specifications- Product type: Ceramic‑to‑Metal and Glass‑Ceramic‑to‑Metal multipin feedthroughs (two or more conductors)
- Typical ceramic insulator: 94%–99% Al2O3 (alumina)
- Metals: Kovar®, stainless steel, nickel‑iron alloys, cupro‑nickel alloys, molybdenum, Alumel®
- Brazing alloys: copper, gold‑copper, silver‑copper
- Electrical: >12 kV DC voltage capability; up to 40 A per pin current rating
- Vacuum performance: Suitable for high‑vacuum and ultra‑high‑vacuum; hermetic leak tested to 1×10‑10 mbar·L/s He
- Temperature range: −250°C to +450°C
- Compliance: RoHS compliant
- Typical use: Transmission of instrumentation signals, voltage and current into vacuum systems; accepts plugs on air side (some designs accept vacuum‑side plugs)