Vacuum feedthrough

hermetically-sealedEMI-shieldedweld

Overview
Innovacera’s high-voltage shielded vacuum feedthrough is a through-wall electrode engineered for reliable transmission of high voltage into vacuum chambers while maintaining a hermetic ceramic-to-metal seal. An integrated grounded shield suppresses high-voltage field interference to reduce leakage and electrical breakdown risk in demanding vacuum and precision high-voltage systems.

Key features

• Integrated grounded shield for EMI suppression and isolation of high-voltage fields
• Electrical rating: 5 kV DC / 3.6 A
• Weldable 304 stainless steel housing for permanent chamber attachment
• Ceramic-to-metal hermetic sealing
• Welded plug-free structure option available
• Designed to minimize leakage and prevent electrical breakdown in vacuum environments

Materials (available options)

• Alumina (Al2O3)
• Aluminum Nitride (AlN)
• Zirconia (ZrO2)
• Boron Nitride (BN)
• Silicon Carbide (SiC)
• Silicon Nitride (Si3N4)
• Porous ceramics
• Machinable glass ceramics
• Zirconia-toughened alumina (ZTA)

Applications

• Semiconductor processing equipment
• Mass spectrometers
• Ultra-high vacuum (UHV) systems
• Optics and photonics instruments
• Electrical and electronic test equipment
• Energy systems requiring high-voltage feedthroughs
• Medical and life-science instruments
• Research and laboratory vacuum apparatus
• Other precision high-voltage vacuum equipment

Frequently noted functional points

• Weldable 304 stainless steel housing enables direct welding to chamber walls for permanent UHV hermetic sealing
• Grounded shielding reduces leakage risk and lowers potential for electrical breakdown under high-voltage vacuum conditions

Technical specifications

• Electrical rating: 5 kV DC, 3.6 A
• Housing material: 304 stainless steel (weldable)
• Sealing: Ceramic-to-metal hermetic sealing
• Structure: Welded, plug-free structure option available
• Maximum pressure (withstand): 1400 PSIG @ 20°C
• Working temperature (plug-free configuration): -269°C to 450°C
• Working temperature (with plug): -65°C to 165°C
• Primary benefits: EMI suppression, isolation of HV fields, minimized leakage, prevention of electrical breakdown
• Typical use environments: vacuum chambers, UHV systems, semiconductor processing equipment, mass spectrometers