Vacuum feedthrough

multiple-elementhermetically-sealedcorrosion-resistant

Product Overview
INNOVACERA’s dual-pin high-voltage ceramic insulator is a ceramic-to-metal assembly designed to transmit electrical power through the wall of a vacuum chamber while preserving electrical insulation and vacuum integrity. It is intended for vacuum coating, thermal evaporation and vacuum heating systems where reliable internal feedthroughs are required.

Details
The unit features two independently insulated conductor terminals with externally threaded rods for simple external connection. A SUS304 stainless-steel base enables welded integration with vacuum chambers or mounting flanges. The ceramic-to-metal assembly uses 96% alumina ceramic, Kovar conductors, C1220 copper components and a SUS304 base to ensure electrical insulation, mechanical stability and vacuum sealing under repeated temperature cycles. An optional quartz glass shield is available to protect the ceramic and connection area from evaporated materials and process deposits.

Key Features

• Dual-pin electrical feedthrough
• Ceramic-to-metal vacuum-sealed construction
• Welded installation for secure chamber integration
• Externally threaded conductor rods for easy external connections
• Optional quartz shield for deposit protection
• Designed for repeated temperature cycling
• Compact integrated design
• Customizable interface to equipment

Technical Specification

• Product Type — Dual-pin high voltage ceramic insulator
• Number of Conductor Terminals — 2
• Ceramic Material — 96% alumina ceramic
• Conductor Material — Kovar
• Copper Component Material — C1220 copper
• Base Material — SUS304 stainless steel
• Installation Method — Welded installation
• Terminal Configuration — Externally threaded conductor rods
• Leak Rate — 4.2 × 10⁻⁶ Pa·m³/s
• Primary Applications — Vacuum coating equipment and vacuum evaporation systems

Typical Applications

• Thermal evaporation coating equipment
• Resistance evaporation sources
• Evaporation boats and filaments
• Crucible heaters
• Vacuum resistance heating systems
• Laboratory vacuum deposition equipment

Advantages

• Reliable electrical isolation between conductors and vacuum chamber
• Stable power transmission through the chamber wall
• Secure welded integration with chamber or mounting flange
• Good heat resistance and dimensional stability
• Lower outgassing risk vs. polymer-insulated alternatives
• Suitable for long-term vacuum operation and repeated thermal cycles