Engine cylinder feedthrough HV

vacuumhermetically-sealedcorrosion-resistant

Overview
INNOVACERA's small high-voltage vacuum feedthrough is an electrical penetration device designed for high-vacuum environments. It transmits high-voltage power or signals hermetically from atmosphere into a vacuum chamber while maintaining vacuum integrity and insulation performance. The insulator is 95% alumina ceramic combined with metal parts (304 stainless steel, oxygen-free copper, Kovar) to ensure stability under demanding process conditions.

Applications

• Excimer laser systems: reliable high-voltage feeding solution for discharge cavities
• Semiconductor and optoelectronics: photolithography, wafer processing, optical component manufacturing, fiber grating writing
• Display panels: LTPS annealing, flexible panel processing
• Automotive manufacturing: surface treatment of engine cylinders, airbag triggering systems
• New energy & research: photovoltaic cell production, surface modification, laboratory experiments

Product structure and materials

• Insulator: 95% alumina ceramic — high dielectric strength, high temperature resistance, low outgassing
• Conductor/Pin: Kovar alloy or oxygen-free copper (OFC) — matched thermal expansion and excellent conductivity
• Shell/Flange: 304 stainless steel or Kovar alloy — corrosion resistant, weldable, vacuum compatible

Technical specification parameters

• Insulating material: 95% Al₂O₃ ceramic
• Metal parts: 304 stainless steel / Kovar alloy / oxygen-free copper
• Voltage rating: 1 kV – 30 kV (higher voltages available on request)
• Operating temperature: -40°C to +300°C (customizable)
• Helium leak rate: ≤1×10⁻¹⁰ Pa·m³/s
• Insulation resistance: >10¹² Ω
• Flange/connector options: CF, KF or customized

Key features

• Hermetic high-voltage transmission for high-vacuum applications
• High dielectric strength and low outgassing thanks to 95% alumina insulator
• Materials selected for thermal expansion compatibility and vacuum sealing
• Customization available for voltage, flange type and temperature range
• Manufactured and tested to ensure low helium leak rate and high insulation resistance

Customization & ordering

• Voltage, pin configuration, flange type (CF/KF/custom) and temperature range can be tailored to application requirements
• Higher voltage designs and special materials available on request
• Supply documentation: vacuum leak test report, material certificates and electrical test data