Semiconductor feedthrough

vacuummultiple-elementhermetically-sealed

Overview Innovacera high-reliability 8-pin ceramic vacuum feedthrough designed for UHV systems and compatible with CF35 (CF2.75) flanges. It provides an alternative to standard ceramic-to-metal seal vacuum connector feedthroughs with equivalent voltage rating, pin configuration and flange standard while supporting customization and shorter lead times.

Advantages

• Equivalent to standard ceramic-to-metal seal vacuum connector feedthrough specifications
• Supports 10 kV high voltage and 30 A current
• Reliable UHV hermetic sealing
• Standard CF2.75 flange for easy replacement with CF35 interfaces
• Customizable conductor material (Molybdenum or Copper) and pin layout
• CAD drawings and engineering support available

Application

• Semiconductor equipment
• Vacuum chambers
• High voltage testing systems
• Ion beam and plasma systems
• Ultra-High Vacuum (UHV) systems

Technical specifications

• Number of Pins: 8
• Voltage Rating: 10 kV
• Current Rating: 30 A
• Conductor Diameter Size: 0.094 inch (2.3876 mm)
• Conductor Material: Copper or Molybdenum (or customized)
• Insulator: 95% Alumina Ceramic
• Flange: CF2.75 (CF35)
• Operating Temperature Range: -269 to 450 °C
• Maximum Pressure: 1500 psig
• Overall Size: OD 69.5 × 169 mm