Scanning electron microscope SU9600 (T)SEM

for thin-film measurementsfor researchfor materials research

The unique transmission-optimized SEM, for advanced nanomaterials analysis

• Combines the capabilities of analytical STEM and UHR-SEM in one high stability platform
• Ultra high-resolution imaging from 10v to 30kV, for incredible surface and structural studies across a wide range of materials
• Cold field emission gun, full-immersion objective lens and TEM sample stage combine to make the SU9600 the world’s highest resolution SEM (0.34nm guaranteed, ~0.2nm achievable)
• Comprehensive reflected and transmitted electron detection with energy and angular filtering
• Correlate surface information using SE/BSE with transmitted electron information from BF/ADF/EELS/4D-STEM
• Sub-nm elemental analysis with high solid angle windowless EDS
• Study fundamental material properties with EELS and 4D-STEM
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Overview

The new-concept SU9600 is a modular microscope perfectly suited to analyzing nanomaterials, 2D materials and semiconductors. Bridging the gap between SEM and TEM, the SU9600 provides unique capabilities by combining UHR-SEM, STEM, 4D-STEM*, EELS* and nano-EDS* together in one high-stability instrument. Perform high-resolution STEM imaging quicker than ever before or take a deep-dive into your material properties with multi-modal studies. All this is available alongside the capabilities of the world’s highest resolution SEM, allowing you to combine true surface information and transmitted-electron information - for better nanoscale understanding