Linear positioning stage MS15
motorizedpiezoelectriccompact

linear positioning stage
linear positioning stage
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Characteristics

Orientation
linear
Type
motorized, piezoelectric
Other characteristics
compact, miniature, vacuum-compatible
Stroke

3 mm
(0.118 in)

Speed

1.5 mm/s

Description

for high vacuum conditions up to 10^(-6) mbar ultra compact design 3.5mm travel xyz – combination possible Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.

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