Vacuum coating line Thin Film Solar Cell Continuous Preparation Equipment

dry

Thin-film CIGS solar cell continuous preparation equipment is used for development and small-scale production of copper, indium, gallium and selenium based thin-film solar cells.

Composition

• Evaporation/deposition chamber for copper, indium, gallium and selenium
• Molybdenum sputtering chamber
• Copper/indium/gallium sputtering chamber
• ZnO sputtering chamber
• Laser photoetching chamber
• Electrochemistry fabrication / processing buffer chamber
• Sample injection chamber (manual)
• Sample delivery chamber and sample bank/device
• Beam source furnace
• Magnetic control target and sample magnetic delivery mechanism
• Sample heating unit and sample cart
• Pump system, vacuum measurement system
• Gas circuit system and electric control system

Technical specifications

• Ultimate pressure of deposition chamber: 6.6×10^-8 Pa
• Ultimate pressure of sputtering chamber: 6.6×10^-5 Pa
• Sample injection chamber: manual open/close; capacity: up to 6 samples
• Sample substrate: glass; typical size: 100 × 100 × 3 mm
• Sputtering chamber sample capacity: 1 sample
• Sample handling: substrates can be heated and manually delivered to each related station in vacuum state