Temperature control unit without display Semistat S 1200

thermoelectricprocess

Point of use (POU) temperature control systems can reduce energy consumption by up to 90 % compared to compressor-based systems. Minimal space requirements with the option of underfloor installation at the point of use minimizes cleanroom use. Quick and precise temperature control of the process temperature profiles to ±0.1 °C improves wafer-to-wafer homogeneity. Features Thermoelectric process thermostat with low energy consumption Quiet and low vibration level operation due to refrigerant free cooling technology No filters or DI components required With a connection to purge with clean dry air (CDA) to prevent condensation Use of perfuorinated fluids Water cooled system Compact overall size and low weight Extremely low volume of heat transfer liquid SEMI S2 and F47 compliant Technical data (according to DIN 12876) Temperature stability 0.1 ± K Heater power min. 3 kW Min. filling volume 1 L Max. filling volume 1.3 L Dimensions (WxDxH) 116 x 232 x 470 mm Weight 15 kg Power supply Connection to PSC