Temperature control system Semistat S 4400

Product overview
The Semistat S 4400 is a thermoelectric point-of-use temperature control unit designed for process applications requiring fast and precise temperature regulation. Its compact footprint and option for underfloor installation at the point of use reduce cleanroom occupied space. Precise control to ±0.1 K improves wafer-to-wafer homogeneity while delivering significant energy savings compared with compressor-based systems.

Features

• Thermoelectric process thermostat with low energy consumption
• Quiet operation with low vibration due to refrigerant-free cooling technology
• No filters or DI components required
• Connection for purge with clean dry air (CDA) to prevent condensation
• Use of perfluorinated heat transfer fluids
• Water-cooled design
• Compact dimensions and low weight
• Extremely low volume of heat transfer liquid
• Compliant with SEMI S2 and F47

Working range

• Minimum working temperature: -20 °C
• Maximum working temperature: 90 °C
• Temperature stability: ±0.1 K

Cooling capacity (examples)
Temperature — Cooling capacity 50 Hz — Cooling capacity 60 Hz
20 °C — 4.4 kW — 4.4 kW
10 °C — 3.5 kW — 3.5 kW
0 °C — 2.6 kW — 2.6 kW
-10 °C — 1.65 kW — 1.65 kW
-20 °C — 0.7 kW — 0.7 kW

Technical data (according to DIN 12876)

• Working temperature range: -20 ... 90 °C
• Temperature stability: ±0.1 K
• Minimum heater power: 12 kW
• Minimum filling volume: 2.5 L
• Maximum filling volume: 2.8 L
• Dimensions (W×D×H): 194 x 300 x 560 mm
• Weight: 38 kg
• Power supply: Connection to PSC