Compact thermostatic bath Semistat S 2400

constant temperaturethermostatwater-cooled

Product description
Point-of-use (POU) thermoelectric process thermostat designed for precise temperature control of semiconductor and laboratory processes. Offers up to 90% energy savings compared with compressor-based systems. Compact footprint allows underfloor installation at the point of use to minimise cleanroom space requirements. Fast and accurate regulation of process temperature profiles to ±0.1 K improves wafer-to-wafer homogeneity.

Features

• Thermoelectric process thermostat with low energy consumption
• Refrigerant-free cooling for quiet, low-vibration operation
• No filters or DI components required
• CDA purge connection to prevent condensation
• Use of perfluorinated heat transfer fluids
• Available in water-cooled configuration
• Compact overall size and low weight
• Extremely low heat transfer fluid volume
• Compliant with SEMI S2 and F47

Working range

• Minimum working temperature: -20 °C
• Maximum working temperature: 90 °C
• Temperature stability: 0.1 ± K

Cooling capacity
Temperature | Cooling capacity 50 Hz | Cooling capacity 60 Hz
20 °C | 2.45 kW | 2.45 kW
10 °C | 1.93 kW | 1.93 kW
0 °C | 1.40 kW | 1.40 kW
-10 °C | 0.88 kW | 0.88 kW
-20 °C | 0.35 kW | 0.35 kW

Additional information

• Part no.: L003277
• Device category: Thermoelectric process thermostats / Process thermostats

Technical specifications

• Working temperature range: -20 ... 90 °C
• Temperature stability: 0.1 ± K
• Minimum heater power: 6 kW
• Minimum filling volume: 1.25 L
• Maximum filling volume: 1.6 L
• Dimensions (W×D×H): 116 x 300 x 560 mm
• Weight: 27 kg (net 26.81 kg)
• Power supply / connection: Connection to PSC