EtherCAT communication module COMX 51CA-RER/ECS V4

data transmission

Product overview
The COMX 51CA-RE\R/ECS EtherCAT Slave communication module is designed for integration into automation devices used in semiconductor manufacturing. It provides a network interface compliant with the ETG.5003-1 Common Device Profile to connect instruments such as mass flow controllers and vacuum valves to EtherCAT-based control systems. Addressing is managed via the "Explicit Device ID", configurable by the module's rotary switch.

Highlights

• EtherCAT Slave network interface tailored for semiconductor manufacturing equipment
• Designed according to ETG.5003-1 (Common Device Profile)
• Complete slave interface with onboard network connector
• Host connection via dual-port memory or SPI
• Firmware update via integrated web server

Supported protocols

• EtherCAT Slave

Order information
Product name: COMX 51CA-RE\R/ECS V4
Part number: 1571.101/ECSV4
Brief description: Communication module for the semiconductor industry

Technical specifications

• Protocol: EtherCAT Slave (ETG.5003-1 / Common Device Profile)
• Application: Semiconductor manufacturing equipment (e.g. mass flow controllers, vacuum valves)
• Addressing: "Explicit Device ID" (settable via rotary switch)
• Network connector: onboard (complete slave interface)
• Host interfaces: dual-port memory or SPI
• Firmware update: integrated web server
• Product lifecycle state: Active